Invention Grant
- Patent Title: Liquid delivery method, liquid delivery system, and computer-readable storage medium
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Application No.: US14918674Application Date: 2015-10-21
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Publication No.: US10400760B2Publication Date: 2019-09-03
- Inventor: Takashi Sasa , Katsuya Hashimoto , Daiki Shibata , Takeshi Ohto
- Applicant: Tokyo Electron Limited
- Applicant Address: JP Tokyo
- Assignee: TOKYO ELECTRONIC LIMITED
- Current Assignee: TOKYO ELECTRONIC LIMITED
- Current Assignee Address: JP Tokyo
- Agency: Pearne & Gordon LLP
- Priority: JP2014-216461 20141023
- Main IPC: F04B49/06
- IPC: F04B49/06 ; F04B43/00 ; F04B43/08 ; F04B43/10 ; F04B51/00 ; G03F7/16 ; H01L21/67

Abstract:
A liquid can be delivered with a simple configuration. A liquid delivery method includes allowing a liquid to flow in a tube having elasticity depending on a pressure of a gas filled in an inner space between a tube housing covering an outside of the tube and an outer surface of the tube; obtaining a magnitude of a pressure of the liquid flowing in the tube as a first value; obtaining a magnitude of the pressure of the gas filled in the inner space as a second value; calculating a difference between the first value and the second value as a third value; and detecting a status of the tube on the basis of the third value.
Public/Granted literature
- US20160116845A1 LIQUID DELIVERY METHOD, LIQUID DELIVERY SYSTEM, AND COMPUTER-READABLE STORAGE MEDIUM Public/Granted day:2016-04-28
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