公开(公告)号：US11561473B2

公开(公告)日：2023-01-24

申请号：US17113591

申请日：2020-12-07

Applicant: Tokyo Electron Limited

Inventor： Takashi Yamauchi ,  Daiki Shibata ,  Kohei Kawakami

IPC: G03F7/16 ,  H01L21/67 ,  B05C11/10 ,  B05B9/00 ,  H01L21/687 ,  H01L21/027

Abstract: A liquid treatment apparatus includes: a substrate holder for holding a substrate; a discharge nozzle for discharging a treatment liquid onto the substrate; a liquid supply pipe for supplying the treatment liquid from a treatment liquid storage source to the discharge nozzle; a gas pipe that encompasses the liquid supply pipe and through which an inert gas for adjusting the temperature of the treatment liquid flows in a space between the gas pipe and the liquid supply pipe; a processing container in which the substrate holder, the discharge nozzle, the liquid supply pipe, and the gas pipe are provided; and an atmosphere gas supply part for supplying an atmosphere gas into the processing container. The gas pipe is provided so that an extension portion between an upstream end inside the processing container and an encompassing portion is folded back inside the processing container in a plan view.

公开(公告)号：US12261064B2

公开(公告)日：2025-03-25

申请号：US16870085

申请日：2020-05-08

Applicant: TOKYO ELECTRON LIMITED

Inventor： Tomohiko Muta ,  Daiki Shibata ,  Akiko Kai ,  Makoto Ogata

IPC: H01L21/67 ,  B05C11/10

Abstract: A tank includes a container part having an upper wall, a sidewall and a bottom wall to store a processing liquid therein, a liquid discharge passage installed at a position higher than a liquid surface of the processing liquid stored in the container part to discharge the processing liquid into the container part, and a gas discharge passage installed at a position higher than the liquid surface to discharge a gas into the container part. The liquid discharge passage discharges the processing liquid from the liquid discharge port so that the processing liquid is brought into contact with a portion above the liquid surface of an inner surface of the sidewall. The gas discharge passage discharges the gas from the gas discharge port so that the gas is brought into contact with a portion above the liquid surface of an inner surface of the container part.

公开(公告)号：US11860542B2

公开(公告)日：2024-01-02

申请号：US18098572

申请日：2023-01-18

Applicant: TOKYO ELECTRON LIMITED

Inventor： Takashi Yamauchi ,  Daiki Shibata ,  Kohei Kawakami

IPC: G03F7/16 ,  H01L21/67 ,  B05C11/10 ,  B05B9/00 ,  H01L21/687 ,  H01L21/027

CPC classification number: G03F7/162 ,  B05B9/002 ,  B05C11/1042 ,  H01L21/6715 ,  H01L21/67017 ,  H01L21/67248 ,  H01L21/68764 ,  H01L21/0273

Abstract: A liquid treatment apparatus includes: a substrate holder for holding a substrate; a discharge nozzle for discharging a treatment liquid onto the substrate; a liquid supply pipe for supplying the treatment liquid from a treatment liquid storage source to the discharge nozzle; a gas pipe that encompasses the liquid supply pipe and through which an inert gas for adjusting the temperature of the treatment liquid flows in a space between the gas pipe and the liquid supply pipe; a processing container in which the substrate holder, the discharge nozzle, the liquid supply pipe, and the gas pipe are provided; and an atmosphere gas supply part for supplying an atmosphere gas into the processing container. The gas pipe is provided so that an extension portion between an upstream end inside the processing container and an encompassing portion is folded back inside the processing container in a plan view.

公开(公告)号：US20160116845A1

公开(公告)日：2016-04-28

申请号：US14918674

申请日：2015-10-21

Applicant: Tokyo Electron Limited

Inventor： Takashi Sasa ,  Katsuya Hashimoto ,  Daiki Shibata ,  Takeshi Ohto

IPC: G03F7/16 ,  F04B49/06

CPC classification number: F04B49/065 ,  F04B43/0072 ,  F04B43/08 ,  F04B43/084 ,  F04B43/10 ,  F04B51/00 ,  G03F7/162 ,  H01L21/6715

Abstract: A liquid can be delivered with a simple configuration. A liquid delivery method includes allowing a liquid to flow in a tube having elasticity depending on a pressure of a gas filled in an inner space between a tube housing covering an outside of the tube and an outer surface of the tube; obtaining a magnitude of a pressure of the liquid flowing in the tube as a first value; obtaining a magnitude of the pressure of the gas filled in the inner space as a second value; calculating a difference between the first value and the second value as a third value; and detecting a status of the tube on the basis of the third value.

Abstract translation: 液体可以以简单的配置进行输送。 液体输送方法包括允许液体在具有弹性的管中流动，这取决于填充在覆盖管的外部的管壳体与管的外表面之间的内部空间中的气体的压力; 获得在管中流动的液体的压力的大小作为第一值; 获得填充在内部空间中的气体的压力的大小作为第二值; 计算第一值和第二值之间的差作为第三值; 以及基于所述第三值检测所述管的状态。

公开(公告)号：US10400760B2

公开(公告)日：2019-09-03

申请号：US14918674

申请日：2015-10-21

Applicant: Tokyo Electron Limited

Inventor： Takashi Sasa ,  Katsuya Hashimoto ,  Daiki Shibata ,  Takeshi Ohto

IPC: F04B49/06 ,  F04B43/00 ,  F04B43/08 ,  F04B43/10 ,  F04B51/00 ,  G03F7/16 ,  H01L21/67

Abstract: A liquid can be delivered with a simple configuration. A liquid delivery method includes allowing a liquid to flow in a tube having elasticity depending on a pressure of a gas filled in an inner space between a tube housing covering an outside of the tube and an outer surface of the tube; obtaining a magnitude of a pressure of the liquid flowing in the tube as a first value; obtaining a magnitude of the pressure of the gas filled in the inner space as a second value; calculating a difference between the first value and the second value as a third value; and detecting a status of the tube on the basis of the third value.

公开(公告)号：US10036379B2

公开(公告)日：2018-07-31

申请号：US14559950

申请日：2014-12-04

Applicant: TOKYO ELECTRON LIMITED

Inventor： Takashi Sasa ,  Daiki Shibata

IPC: F04B43/12 ,  A61M5/142 ,  B05C17/03 ,  G03F7/16 ,  H01L21/67 ,  F04B49/24 ,  F04B43/08 ,  F04B49/06

CPC classification number: F04B43/1238 ,  A61M5/14232 ,  B05C17/0333 ,  F04B43/08 ,  F04B43/1246 ,  F04B43/1253 ,  F04B43/1261 ,  F04B43/1276 ,  F04B43/1284 ,  F04B49/06 ,  F04B49/065 ,  F04B49/24 ,  G03F7/16 ,  H01L21/67017 ,  H01L21/6715 ,  Y10T137/794 ,  Y10T137/86027

Abstract: In one embodiment, a feed pump of a tube pump type is used for supplying a processing liquid. The tube pump has a squeezing member that moves from a first axial position of a tube at which the squeezing member starts pinching of the tube, to a second axial position at which the squeezing member leaves the tube after feeding the processing liquid toward an ejecting part such as a nozzle. Only one pinched part pinched between the squeezing member and a guide member is formed between the first axial position and the second axial position of the tube, and the only one pinched part moves along the axial direction of the tube, during feeding of a dose of the processing liquid toward the ejecting part.