公开(公告)号：US10518199B2

公开(公告)日：2019-12-31

申请号：US15696365

申请日：2017-09-06

Applicant: Tokyo Electron Limited

Inventor： Takashi Sasa ,  Daisuke Ishimaru ,  Katsuya Hashimoto ,  Hideo Shite ,  Shinya Wakamizu ,  Kazuhiko Kimura

IPC: B01D29/60 ,  G03F7/16 ,  B01D37/04 ,  B01D35/02 ,  G03F7/30 ,  F04B43/08 ,  F04B43/02 ,  F04B53/10 ,  F04B53/20

Abstract: A treatment solution supply apparatus for supplying a treatment solution to a treatment solution discharge unit that discharges the treatment solution to a treatment body, includes: a temporary storage apparatus that temporarily stores the treatment solution supplied from a treatment solution supply source that stores the treatment solution; a filter that removes a foreign substance in the treatment solution from the temporary storage apparatus; and a pump that sends the treatment solution from which the foreign substance has been removed by the filter to the treatment solution discharge unit, wherein the temporary storage apparatus has a pressure-feeding function of pressure-feeding the treatment solution stored in the temporary storage apparatus.

公开(公告)号：US20160116845A1

公开(公告)日：2016-04-28

申请号：US14918674

申请日：2015-10-21

Applicant: Tokyo Electron Limited

Inventor： Takashi Sasa ,  Katsuya Hashimoto ,  Daiki Shibata ,  Takeshi Ohto

IPC: G03F7/16 ,  F04B49/06

CPC classification number: F04B49/065 ,  F04B43/0072 ,  F04B43/08 ,  F04B43/084 ,  F04B43/10 ,  F04B51/00 ,  G03F7/162 ,  H01L21/6715

Abstract: A liquid can be delivered with a simple configuration. A liquid delivery method includes allowing a liquid to flow in a tube having elasticity depending on a pressure of a gas filled in an inner space between a tube housing covering an outside of the tube and an outer surface of the tube; obtaining a magnitude of a pressure of the liquid flowing in the tube as a first value; obtaining a magnitude of the pressure of the gas filled in the inner space as a second value; calculating a difference between the first value and the second value as a third value; and detecting a status of the tube on the basis of the third value.

Abstract translation: 液体可以以简单的配置进行输送。 液体输送方法包括允许液体在具有弹性的管中流动，这取决于填充在覆盖管的外部的管壳体与管的外表面之间的内部空间中的气体的压力; 获得在管中流动的液体的压力的大小作为第一值; 获得填充在内部空间中的气体的压力的大小作为第二值; 计算第一值和第二值之间的差作为第三值; 以及基于所述第三值检测所述管的状态。

公开(公告)号：US11333142B2

公开(公告)日：2022-05-17

申请号：US16775468

申请日：2020-01-29

Applicant: Tokyo Electron Limited

Inventor： Daisuke Ishimaru ,  Katsuya Hashimoto ,  Yasuhiro Takaki

IPC: F04B43/08 ,  F04B43/00 ,  F04B43/10

Abstract: There is disclosed a hollow tube body used for a liquid feeding member and deformable by pressurization, wherein: an axial cross-section of the tube body has two opposing long side parts and two opposing short side parts; four corner portions formed by the long side parts and the short side parts each have a shape curved to protrude outward; each of the long side parts has a recessed part recessed inward and continuing from the corner portions; and a portion other than the corner portions of each of the short side parts is in a flat shape.

公开(公告)号：US10400760B2

公开(公告)日：2019-09-03

申请号：US14918674

申请日：2015-10-21

Applicant: Tokyo Electron Limited

Inventor： Takashi Sasa ,  Katsuya Hashimoto ,  Daiki Shibata ,  Takeshi Ohto

IPC: F04B49/06 ,  F04B43/00 ,  F04B43/08 ,  F04B43/10 ,  F04B51/00 ,  G03F7/16 ,  H01L21/67

Abstract: A liquid can be delivered with a simple configuration. A liquid delivery method includes allowing a liquid to flow in a tube having elasticity depending on a pressure of a gas filled in an inner space between a tube housing covering an outside of the tube and an outer surface of the tube; obtaining a magnitude of a pressure of the liquid flowing in the tube as a first value; obtaining a magnitude of the pressure of the gas filled in the inner space as a second value; calculating a difference between the first value and the second value as a third value; and detecting a status of the tube on the basis of the third value.