Invention Grant
- Patent Title: Super long channel device within VFET architecture
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Application No.: US15813523Application Date: 2017-11-15
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Publication No.: US10424663B2Publication Date: 2019-09-24
- Inventor: Marc A. Bergendahl , Kangguo Cheng , Gauri Karve , Fee Li Lie , Eric R. Miller , John R. Sporre , Sean Teehan
- Applicant: International Business Machines Corporation
- Applicant Address: US NY Armonk
- Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee Address: US NY Armonk
- Agency: Cantor Colburn LLP
- Agent Vazken Alexanian
- Main IPC: H01L29/78
- IPC: H01L29/78 ; H01L29/08 ; H01L29/10 ; H01L29/66 ; H03K17/687 ; H01L29/786 ; H01L29/06 ; H01L29/49 ; H01L29/51

Abstract:
Embodiments are directed to methods and resulting structures for a vertical field effect transistor (VFET) having a super long channel. A pair of semiconductor fins is formed on a substrate. A semiconductor pillar is formed between the semiconductor fins on the substrate. A region that extends under all of the semiconductor fins and under part of the semiconductor pillar is doped. A conductive gate is formed over a channel region of the semiconductor fins and the semiconductor pillar. A surface of the semiconductor pillar serves as an extended channel region when the gate is active.
Public/Granted literature
- US20180342615A1 SUPER LONG CHANNEL DEVICE WITHIN VFET ARCHITECTURE Public/Granted day:2018-11-29
Information query
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