Invention Grant
- Patent Title: Apparatus for high-speed imaging sensor data transfer
-
Application No.: US15671729Application Date: 2017-08-08
-
Publication No.: US10429321B2Publication Date: 2019-10-01
- Inventor: Steve Zamek , David L. Brown , Venkatraman Iyer
- Applicant: KLA-Tencor Corporation
- Applicant Address: US CA Milpitas
- Assignee: KLA-Tencor Corporation
- Current Assignee: KLA-Tencor Corporation
- Current Assignee Address: US CA Milpitas
- Agency: Suiter Swantz pc llo
- Main IPC: G01N21/95
- IPC: G01N21/95 ; G01T1/24 ; H01L27/146 ; H04N5/372 ; H04N5/225 ; H01J37/28

Abstract:
An imaging sensor assembly includes at least one substrate including a plurality of substrate signal lines. The imaging sensor assembly also includes at least one imaging sensor package disposed on the at least one substrate, the at least one imaging sensor package including at least one imaging sensor disposed on at least one imaging sensor package substrate. The imaging sensor assembly also includes at least one receiver package disposed on the at least one substrate, the receiver package including at least one receiver integrated circuit disposed on at least one receiver package substrate. The imaging sensor assembly also includes at least one electrical interconnect operably coupled to the at least one imaging sensor package and the at least one receiver package. A plurality of data signals are transmitted between the at least one imaging sensor package and the at least one receiver package via the at least one electrical interconnect.
Public/Granted literature
- US20180059033A1 Apparatus for High-Speed Imaging Sensor Data Transfer Public/Granted day:2018-03-01
Information query