Invention Grant
- Patent Title: Method of inspecting a specimen and system thereof
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Application No.: US16025869Application Date: 2018-07-02
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Publication No.: US10444274B2Publication Date: 2019-10-15
- Inventor: Zvi Goren , Adi Boehm , Amit Batikoff
- Applicant: Applied Materials Israel Ltd.
- Applicant Address: IL Rehovot
- Assignee: APPLIED MATERIALS ISRAEL LTD.
- Current Assignee: APPLIED MATERIALS ISRAEL LTD.
- Current Assignee Address: IL Rehovot
- Agency: Lowenstein Sandler LLP
- Main IPC: G06F17/50
- IPC: G06F17/50 ; G01R31/26 ; G01R31/28 ; H01L21/66 ; G01R31/303

Abstract:
There is provided an inspection system for inspecting a specimen, an inspection unit capable to operate in conjunction with an inspection machine unit, a die layout clipping unit, methods of inspecting a specimen, and a method of providing a die layout clip. The method of inspecting a specimen comprises: obtaining location information indicative of coordinates of a potential defect of interest revealed in the specimen and of one or more inspected layers corresponding to the potential defect of interest; sending to a die layout clipping unit a first data indicative of the location information and dimensions of an inspection area containing the potential defect of interest; receiving a die layout clip generated in accordance with the first data; specifying at least one inspection algorithm of the inspection area using information comprised in the die layout clip; and enabling inspection of the inspection area using the specified inspection algorithm.
Public/Granted literature
- US20180321299A1 METHOD OF INSPECTING A SPECIMEN AND SYSTEM THEREOF Public/Granted day:2018-11-08
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