- Patent Title: Method of controlling display of operation of semiconductor manufacturing apparatus and non-transitory computer readable storage medium therefor, and system for performing display concerning operation of semiconductor manufacturing apparatus
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Application No.: US15941760Application Date: 2018-03-30
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Publication No.: US10446422B2Publication Date: 2019-10-15
- Inventor: Masayuki Fujiki , Hideharu Aoyama , Ryuya Koizumi
- Applicant: EBARA CORPORATION
- Applicant Address: JP Tokyo
- Assignee: EBARA CORPORATION
- Current Assignee: EBARA CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: Baker & Hostetler LLP
- Priority: JP2017-070972 20170331
- Main IPC: G06F3/0484
- IPC: G06F3/0484 ; H01L21/67 ; C25D17/00 ; G06F3/147 ; G05B19/46 ; C25D21/12 ; G06T13/80
Abstract:
A method is provided, the method including: repeatedly acquiring a state of one or more devices included in the semiconductor manufacturing apparatus; providing a first animation indicating an operation of the semiconductor manufacturing apparatus by displaying at least an image indicating the state of one or more devices on a display unit each time the state is acquired; storing, in a memory, the acquired state of one or more devices and a time related to the state; receiving an input for switching a display mode; and providing a second animation of the semiconductor manufacturing apparatus by displaying, one by one on the display unit, at least one or more images respectively indicating the state of one or more devices related to one or more times including a reference time stored in the memory, after receiving the input for switching a display mode.
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