- 专利标题: Tetracarboxylic acid diester compound, polyimide precursor polymer and method for producing the same, negative photosensitive resin composition, positive photosensitive resin composition, patterning process, and method for forming cured film
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申请号: US15457493申请日: 2017-03-13
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公开(公告)号: US10457779B2公开(公告)日: 2019-10-29
- 发明人: Katsuya Takemura , Hiroyuki Urano , Masashi Iio , Masayoshi Sagehashi , Koji Hasegawa
- 申请人: SHIN-ETSU CHEMICAL CO., LTD.
- 申请人地址: JP Tokyo
- 专利权人: SHIN-ETSU CHEMICAL CO., LTD.
- 当前专利权人: SHIN-ETSU CHEMICAL CO., LTD.
- 当前专利权人地址: JP Tokyo
- 代理机构: Oliff PLC
- 优先权: JP2016-83787 20160419
- 主分类号: G03F7/023
- IPC分类号: G03F7/023 ; G03F7/031 ; G03F7/037 ; G03F7/038 ; G03F7/38 ; G03F7/40 ; C08G73/10 ; C08G73/12 ; C07C69/76 ; C07C69/88 ; G03F7/022 ; C07C69/92 ; G03F7/004 ; G03F7/039 ; G03F7/16 ; G03F7/20 ; G03F7/32 ; C09D179/08
摘要:
The present invention provides a tetracarboxylic acid diester compound shown by the following general formula (1), wherein X1 represents a tetravalent organic group; and R1 represents a group shown by the following general formula (2), wherein the dotted line represents a bond; Y1 represents an organic group with a valency of k+1; “k” represents 1 or 2; and “n” represents 0 or 1. There can be provided a tetracarboxylic acid diester compound that can give a polyimide precursor polymer soluble in a safe organic solvent widely used as a solvent of a composition and usable as a base resin of a photosensitive resin composition.
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