- 专利标题: Devices having a semiconductor material that is semimetal in bulk and methods of forming the same
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申请号: US15905978申请日: 2018-02-27
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公开(公告)号: US10461179B2公开(公告)日: 2019-10-29
- 发明人: Jean-Pierre Colinge , Carlos H Diaz , Yee-Chia Yeo
- 申请人: Taiwan Semiconductor Manufacturing Company, Ltd.
- 申请人地址: TW Hsin-Chu
- 专利权人: Taiwan Semiconductor Manufacturing Company, Ltd.
- 当前专利权人: Taiwan Semiconductor Manufacturing Company, Ltd.
- 当前专利权人地址: TW Hsin-Chu
- 代理机构: Slater Matsil, LLP
- 主分类号: H01L21/461
- IPC分类号: H01L21/461 ; H01L29/66 ; H01L29/267 ; H01L29/78 ; H01L27/088 ; H01L29/04 ; H01L21/02 ; H01L29/10 ; H01L21/477 ; H01L21/8234 ; H01L29/786 ; H01L21/8256 ; H01L21/8258 ; H01L27/06 ; H01L21/426 ; H01L21/441 ; H01L21/762 ; H01L21/768 ; H01L29/06 ; H01L29/08 ; H01L29/24 ; H01L29/423 ; H01L27/12 ; H01L21/8238 ; H01L27/092
摘要:
Devices, and methods of forming such devices, having a material that is semimetal when in bulk but is a semiconductor in the devices are described. An example structure includes a substrate, a first source/drain contact region, a channel structure, a gate dielectric, a gate electrode, and a second source/drain contact region. The substrate has an upper surface. The channel structure is connected to and over the first source/drain contact region, and the channel structure is over the upper surface of the substrate. The channel structure has a sidewall that extends above the first source/drain contact region. The channel structure comprises a bismuth-containing semiconductor material. The gate dielectric is along the sidewall of the channel structure. The gate electrode is along the gate dielectric. The second source/drain contact region is connected to and over the channel structure.
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