Invention Grant
- Patent Title: Apparatus for inspecting material property of plurality of measurement objects
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Application No.: US15981359Application Date: 2018-05-16
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Publication No.: US10473579B2Publication Date: 2019-11-12
- Inventor: Tae-Heung Ahn , Young Duk Kim , Sang Gil Park , Jun Bum Park , Yoichiro Iwa , Byeong Hwan Jeon
- Applicant: SAMSUNG ELECTRONICS CO., LTD.
- Applicant Address: KR Suwon-si, Gyeonggi-Do
- Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee Address: KR Suwon-si, Gyeonggi-Do
- Agency: F. Chau & Associates, LLC
- Priority: KR10-2017-0117983 20170914
- Main IPC: G01N21/01
- IPC: G01N21/01 ; G01N21/17 ; H01L21/67 ; G01N21/94 ; G01N15/14 ; G01N21/88 ; G01N21/95 ; G01N21/84

Abstract:
An inspection apparatus includes a light source. A first measurement unit is configured to receive light from the light source and direct it to a first measurement object. A second measurement unit is configured to receive the light from the light source and direct it to a second measurement object. An inspection unit is configured to receive a first optical signal provided from the first measurement unit and inspect the first measurement object using the first optical signal, and to receive a second optical signal provided from the second measurement unit and inspect the second measurement object using the second optical signal. A measurement position selection unit is configured to alternately enable the inspection of the two measurement units by adjusting an angle of a reflection mirror.
Public/Granted literature
- US20190079003A1 APPARATUS FOR INSPECTING MATERIAL PROPERTY OF PLURALITY OF MEASUREMENT OBJECTS Public/Granted day:2019-03-14
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