Invention Grant
- Patent Title: Integrated circuit image sensor cell with skimming gate implemented using a vertical gate transistor structure
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Application No.: US15839011Application Date: 2017-12-12
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Publication No.: US10475848B2Publication Date: 2019-11-12
- Inventor: Francois Roy
- Applicant: STMicroelectronics (Crolles 2) SAS
- Applicant Address: FR Crolles
- Assignee: STMicroelectronics (Crolles 2) SAS
- Current Assignee: STMicroelectronics (Crolles 2) SAS
- Current Assignee Address: FR Crolles
- Agency: Crowe & Dunlevy
- Main IPC: H01L27/148
- IPC: H01L27/148 ; H01L27/146 ; H04N9/00

Abstract:
An imaging cell includes a skimming gate transistor coupled between a photosensitive charge node and an intermediate node and a transfer gate transistor coupled between the intermediate node and a sense node. The skimming gate transistor includes a vertical gate electrode structure formed by a first capacitive deep trench isolation extending into a substrate and a second capacitive deep trench isolation extending into the substrate. A channel of the skimming gate transistor is positioned between the first and second capacitive deep trench isolations. Each capacitive deep trench isolation is formed by a trench that is lined with an insulating liner and filled with a conductive or semiconductive material.
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