Invention Grant
- Patent Title: Replacement materials processes for forming cross point memory
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Application No.: US16045514Application Date: 2018-07-25
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Publication No.: US10475853B2Publication Date: 2019-11-12
- Inventor: Jong-Won Lee , Gianpaolo Spadini , Stephen W. Russell , Derchang Kau
- Applicant: MICRON TECHNOLOGY, INC.
- Applicant Address: US ID Boise
- Assignee: Micron Technology, Inc.
- Current Assignee: Micron Technology, Inc.
- Current Assignee Address: US ID Boise
- Agency: Holland & Hart LLP
- Main IPC: H01L27/24
- IPC: H01L27/24 ; H01L43/00 ; H01L45/00 ; G11C13/00

Abstract:
Methods of forming memory cells comprising phase change and/or chalcogenide materials are disclosed. In one aspect, the method includes providing a lower line stack extending in a first direction, the lower line stack comprising a sacrificial line over a lower conductive line. The method further includes forming a chalcogenide line extending in the first direction by selectively removing the sacrificial material of the sacrificial line and replacing the sacrificial line with a chalcogenide material.
Public/Granted literature
- US20190013358A1 REPLACEMENT MATERIALS PROCESSES FOR FORMING CROSS POINT MEMORY Public/Granted day:2019-01-10
Information query
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