Invention Grant
- Patent Title: Apparatus and methods for integrated MEMS devices
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Application No.: US16102592Application Date: 2018-08-13
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Publication No.: US10479676B2Publication Date: 2019-11-19
- Inventor: Ben Lee , Ming Hong Kuo , Wen-Chih Chen , Wensen Tsai
- Applicant: mCube, Inc.
- Applicant Address: US CA San Jose
- Assignee: mCube, Inc.
- Current Assignee: mCube, Inc.
- Current Assignee Address: US CA San Jose
- Agency: Ogawa P.C.
- Agent Richard T. Ogawa
- Main IPC: G01R31/02
- IPC: G01R31/02 ; B81C99/00 ; G01R1/04 ; G01R31/26 ; H01L21/67

Abstract:
A method for a MEMS device includes receiving a diced wafer having a plurality devices disposed upon an adhesive substrate and having an associated known good device data, removing a first set of devices from the plurality of devices from the adhesive substrate in response to the known good device data, picking and placing a first set of the devices into a plurality of sockets within a testing platform, testing the first set of integrated devices includes while physically stressing the first set of devices, providing electrical power to the first set of devices and receiving electrical response data from the first set of devices, determining a second set of devices from the first set of devices, in response to the electrical response data, picking and placing the second set of devices into a transport tape media.
Public/Granted literature
- US20180346328A1 APPARATUS AND METHODS FOR INTEGRATED MEMS DEVICES Public/Granted day:2018-12-06
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