Invention Grant
- Patent Title: Laser apparatus and measurement unit
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Application No.: US15698412Application Date: 2017-09-07
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Publication No.: US10483713B2Publication Date: 2019-11-19
- Inventor: Seiji Nogiwa , Yasufumi Kawasuji
- Applicant: GIGAPHOTON INC.
- Applicant Address: JP Tochigi
- Assignee: Gigaphoton Inc.
- Current Assignee: Gigaphoton Inc.
- Current Assignee Address: JP Tochigi
- Agency: Studebaker & Brackett PC
- Priority: WOPCT/JP2015/062394 20150423
- Main IPC: H01S3/0941
- IPC: H01S3/0941 ; H01S3/10 ; H01S3/104 ; H01S3/23 ; H05G2/00 ; H01S3/101

Abstract:
A laser apparatus may include: a quantum cascade laser outputting, based on a supplied current, laser light at an oscillation start timing when a first delay time elapses from a current rising timing of the supplied current: an amplifier disposed in a laser light optical path, and selectively amplifying light of a predetermined wavelength to output the amplified laser light to a chamber including a plasma generation region into which a target is fed; and a laser controller controlling a third delay time, from an output timing of a laser output instruction to the current rising timing, to cause a laser light wavelength to be equal to the predetermined wavelength at an aimed timing when a second delay time elapses from the oscillation start timing, based on oscillation parameters including the first delay time, a supplied current waveform, and a device temperature of the quantum cascade laser.
Public/Granted literature
- US20170373461A1 LASER APPARATUS AND MEASUREMENT UNIT Public/Granted day:2017-12-28
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