公开(公告)号：US10250007B2

公开(公告)日：2019-04-02

申请号：US15146259

申请日：2016-05-04

Applicant: Gigaphoton Inc.

Inventor： Yasufumi Kawasuji

IPC: H01S3/00 ,  H01S3/02 ,  H01S3/23 ,  H05G2/00

Abstract: A laser apparatus of the present disclosure may include: a frame; a first amplifier positioned to the frame; a first input optical system positioned to the frame and configured to cause a pulse laser beam generated by an external device to enter the first amplifier; and a first output optical system positioned to the frame and configured to cause a pulse laser beam having exited from the first amplifier in a first direction to exit in a second direction that is different from the first direction.

公开(公告)号：US10371469B2

公开(公告)日：2019-08-06

申请号：US15857055

申请日：2017-12-28

Applicant: Gigaphoton Inc.

Inventor： Yasufumi Kawasuji ,  Masazumi Komori ,  Osamu Wakabayashi

IPC: F28F27/00 ,  F28F27/02 ,  G05D23/19 ,  H05G2/00 ,  G21K1/06

Abstract: A device for controlling the temperature of cooling water includes a three-way valve having a first inlet, a second inlet, and an outlet; a first feed pipe; a second feed pipe; and a return pipe for connecting between an outlet of the temperature-control target and an inlet of the cooling water supply unit. The device also includes a return-side bypass pipe for connecting between the return pipe and the second inlet of the three-way valve; a pump provided on the second feed pipe for circulating the cooling water between the three-way valve and the temperature-control target; and a temperature measuring unit for measuring a temperature of the cooling water flowing in the second feed pipe. In addition, the device includes a controller for controlling the three-way valve and the pump in accordance with a detection result of the temperature measuring unit.

公开(公告)号：US10340654B2

公开(公告)日：2019-07-02

申请号：US16052659

申请日：2018-08-02

Applicant: Gigaphoton Inc.

Inventor： Seiji Nogiwa ,  Yasufumi Kawasuji

IPC: H01S3/00 ,  H01S3/131 ,  G02F1/01 ,  H01S3/04 ,  H01S3/042 ,  H05G2/00 ,  H01S5/068 ,  H01S3/0941 ,  H01S3/13 ,  H01S3/16 ,  H01S5/024 ,  H01S3/10

Abstract: A laser apparatus includes a light source configured to output excitation light, an optical resonator in which laser medium is excited by the excitation light, the optical resonator being configured to output laser beam, a temperature regulator configured to adjust temperature of the light source to a standard temperature, an optical detector configured to detect output power of the laser beam, and a controller configured to change the standard temperature based on the detected output power of the laser beam.

公开(公告)号：US09762024B2

公开(公告)日：2017-09-12

申请号：US15016961

申请日：2016-02-05

Applicant: GIGAPHOTON INC.

Inventor： Yoshiaki Kurosawa ,  Yasufumi Kawasuji

IPC: H01S3/23 ,  H01S3/223 ,  H01S3/107 ,  H05G2/00 ,  G03F7/20 ,  H01S3/10 ,  H01S3/00 ,  H01S3/034

CPC classification number: H01S3/2316 ,  G03F7/70041 ,  H01S3/005 ,  H01S3/034 ,  H01S3/10061 ,  H01S3/107 ,  H01S3/2232 ,  H01S2301/02 ,  H05G2/003 ,  H05G2/005 ,  H05G2/008

Abstract: An example of the disclosure is a laser apparatus including a master oscillator capable of outputting a pulse laser beam, a plurality of optical amplifiers disposed on an optical path of the pulse laser beam outputted from the master oscillator and configured to sequentially amplify the pulse laser beam, an optical reflector capable of passing the pulse laser beam therethrough and reflecting a self-oscillation beam generated in one of the plurality of optical amplifiers, and an optical absorber capable of receiving and absorbing the self-oscillation beam reflected by the optical reflector.

公开(公告)号：US09891012B2

公开(公告)日：2018-02-13

申请号：US14279248

申请日：2014-05-15

Applicant: GIGAPHOTON INC.

Inventor： Yasufumi Kawasuji ,  Masazumi Komori ,  Osamu Wakabayashi

IPC: G05D23/00 ,  F28F27/00 ,  G05D23/19

CPC classification number: F28F27/02 ,  F28F27/00 ,  F28F2250/08 ,  G05D23/1917 ,  G21K1/062 ,  H05G2/008

Abstract: A device for controlling the temperature of cooling water includes a three-way valve having a first inlet, a second inlet, and an outlet; a first feed pipe; a second feed pipe; and a return pipe for connecting between an outlet of the temperature-control target and an inlet of the cooling water supply unit. The device also includes a return-side bypass pipe for connecting between the return pipe and the second inlet of the three-way valve; a pump provided on the second feed pipe for circulating the cooling water between the three-way valve and the temperature-control target; and a temperature measuring unit for measuring a temperature of the cooling water flowing in the second feed pipe. In addition, the device includes a controller for controlling the three-way valve and the pump in accordance with a detection result of the temperature measuring unit.

公开(公告)号：US09510434B2

公开(公告)日：2016-11-29

申请号：US14824270

申请日：2015-08-12

Applicant: GIGAPHOTON INC.

Inventor： Hakaru Mizoguchi ,  Yasufumi Kawasuji ,  Osamu Wakabayashi

IPC: H05G2/00 ,  G21K1/06 ,  G03F7/20

CPC classification number: H05G2/008 ,  G03F7/70033 ,  G03F7/7085 ,  G21K1/067 ,  H05G2/003 ,  H05G2/005

Abstract: Provided is an extreme ultraviolet light generating apparatus that may include: a chamber containing one or more kinds of gases; a light concentration optical system provided in an optical path of pulsed laser light outputted from a laser unit, and configured to concentrate the pulsed laser light into a concentrated beam; and an image pickup section provided at a position out of the optical path of the pulsed laser light, and configured to pick up a plasma emission image that is an image of plasma emission in the chamber. The plasma emission is caused by application of the concentrated beam to the one or more kinds of gases in the chamber.

Abstract translation: 提供一种极紫外光发生装置，其可以包括：容纳一种或多种气体的室; 光浓缩光学系统，其设置在从激光单元输出的脉冲激光的光路中，并且将脉冲激光聚焦成浓缩光束; 以及摄像部，其设置在所述脉冲激光的光路外的位置处，并且被配置为拾取作为所述室中的等离子体发射的图像的等离子体发射图像。 等离子体发射是通过将浓缩的束施加到腔室中的一种或多种气体而引起的。

公开(公告)号：US10483713B2

公开(公告)日：2019-11-19

申请号：US15698412

申请日：2017-09-07

Applicant: GIGAPHOTON INC.

Inventor： Seiji Nogiwa ,  Yasufumi Kawasuji

IPC: H01S3/0941 ,  H01S3/10 ,  H01S3/104 ,  H01S3/23 ,  H05G2/00 ,  H01S3/101

Abstract: A laser apparatus may include: a quantum cascade laser outputting, based on a supplied current, laser light at an oscillation start timing when a first delay time elapses from a current rising timing of the supplied current: an amplifier disposed in a laser light optical path, and selectively amplifying light of a predetermined wavelength to output the amplified laser light to a chamber including a plasma generation region into which a target is fed; and a laser controller controlling a third delay time, from an output timing of a laser output instruction to the current rising timing, to cause a laser light wavelength to be equal to the predetermined wavelength at an aimed timing when a second delay time elapses from the oscillation start timing, based on oscillation parameters including the first delay time, a supplied current waveform, and a device temperature of the quantum cascade laser.

公开(公告)号：US10224686B2

公开(公告)日：2019-03-05

申请号：US15356763

申请日：2016-11-21

Applicant: GIGAPHOTON INC.

Inventor： Yasufumi Kawasuji ,  Naoya Takaoka ,  Toshio Yokozuka

IPC: H01S3/102 ,  H01S3/13 ,  H01S3/10 ,  H01L21/027 ,  H01S3/097 ,  H01L21/67 ,  H01S3/09 ,  H01S3/104 ,  H01S3/23 ,  H05G2/00 ,  H01S3/134 ,  H01S3/223 ,  H01S5/34 ,  H01S5/40

Abstract: A laser apparatus may include: an optical amplifier configured to amplify a laser beam outputted from a master oscillator; an optical-amplifier power supply configured to supply an alternating current for optical amplification to the optical amplifier; and a laser controller. The optical-amplifier power supply may include: an alternating current generation circuit including an inverter circuit configured to change output amplitude in accordance with a duty cycle, the alternating current generation circuit being configured to generate the alternating current from an output of the inverter circuit; and a power supply control circuit configured to hold control information defining correspondence relations between command values from the laser controller and duty cycles of the inverter circuit, determine a duty cycle corresponding to a command value received from the laser controller based on the control information, and provide the determined duty cycle to the inverter circuit.

公开(公告)号：US09837779B2

公开(公告)日：2017-12-05

申请号：US14455719

申请日：2014-08-08

Applicant: GIGAPHOTON INC.

Inventor： Yasufumi Kawasuji ,  Hideo Hoshino

IPC: H01S3/02 ,  F16B5/02 ,  F16B7/18 ,  F16B41/00 ,  G03F7/20 ,  H05G2/00 ,  H01S3/23

CPC classification number: H01S3/02 ,  F16B5/02 ,  F16B7/18 ,  F16B41/002 ,  G03F7/70008 ,  G03F7/70025 ,  G03F7/70833 ,  G03F7/70975 ,  H01S3/2316 ,  H05G2/005 ,  H05G2/008

Abstract: A laser apparatus may include, a first frame and a second frame, a sleeve through-hole provided in the second frame, a sleeve insertion hole provided in the first frame, a bolt, a positioning sleeve that is formed in an approximately cylindrical shape into which the bolt can be inserted and that positions the first frame and the second frame by passing through the sleeve through-hole and being inserted into the sleeve insertion hole, a nut that is provided in the first frame and into which the bolt is screwed, and a fall prevention unit that is provided in the second frame and that prevents the bolt and the positioning sleeve from falling.

公开(公告)号：US09680277B2

公开(公告)日：2017-06-13

申请号：US14657640

申请日：2015-03-13

Applicant: Gigaphoton Inc.

Inventor： Krzysztof Nowak ,  Takashi Suganuma ,  Takashi Saito ,  Yasufumi Kawasuji

IPC: H01S3/034 ,  H01S3/07 ,  H01S3/09 ,  H01S3/23 ,  H01S3/223 ,  H01S3/22 ,  H01S3/0971 ,  H01S3/03 ,  H05G2/00

CPC classification number: H01S3/034 ,  H01S3/03 ,  H01S3/076 ,  H01S3/0971 ,  H01S3/2232 ,  H01S3/2316 ,  H01S3/2325 ,  H01S3/2366 ,  H01S3/2375 ,  H01S2301/02 ,  H05G2/008

Abstract: There is provided a slab amplifier including an optical system (48, 51) provided in a chamber (47) to allow a seed beam having entered from a first window into the space between a pair of electrodes (42, 43) to be repeatedly reflected between the space so that the seed beam is amplified to be an amplified beam; a first aperture plate (61) provided between the first window and the electrodes, and having an opening of a dimension equal to or greater than a cross-section of the seed beam and equal to or smaller than a dimension of the first window; and a second aperture plate (62) provided between the second window and the electrodes, and having an opening of a dimension equal to or greater than a cross-section of the amplified beam and equal to or smaller than a dimension of the second window.