Invention Grant
- Patent Title: Memory arrays, and methods of forming memory arrays
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Application No.: US16410973Application Date: 2019-05-13
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Publication No.: US10541252B2Publication Date: 2020-01-21
- Inventor: David Daycock , Richard J. Hill , Christopher Larsen , Woohee Kim , Justin B. Dorhout , Brett D. Lowe , John D. Hopkins , Qian Tao , Barbara L. Casey
- Applicant: Micron Technology, Inc.
- Applicant Address: US ID Boise
- Assignee: Micron Technology, Inc.
- Current Assignee: Micron Technology, Inc.
- Current Assignee Address: US ID Boise
- Agency: Wells St. John P.S.
- Main IPC: H01L27/11582
- IPC: H01L27/11582 ; H01L27/1157 ; H01L29/423 ; H01L21/28 ; H01L29/10 ; H01L29/792

Abstract:
Some embodiments include a memory array which has a vertical stack of alternating insulative levels and wordline levels. The wordline levels have terminal ends corresponding to control gate regions. Charge-trapping material is along the control gate regions of the wordline levels and not along the insulative levels. The charge-trapping material is spaced from the control gate regions by charge-blocking material. Channel material extends vertically along the stack and is laterally spaced from the charge-trapping material by dielectric material. Some embodiments include methods of forming NAND memory arrays.
Public/Granted literature
- US20190267396A1 Memory Arrays, and Methods of Forming Memory Arrays Public/Granted day:2019-08-29
Information query
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