Invention Grant
- Patent Title: Hermetically sealed molecular spectroscopy cell
-
Application No.: US15697525Application Date: 2017-09-07
-
Publication No.: US10549986B2Publication Date: 2020-02-04
- Inventor: Juan Alejandro Herbsommer , Simon Joshua Jacobs , Benjamin Stassen Cook , Adam Joseph Fruehling
- Applicant: TEXAS INSTRUMENTS INCORPORATED
- Applicant Address: US TX Dallas
- Assignee: TEXAS INSTRUMENTS INCORPORATED
- Current Assignee: TEXAS INSTRUMENTS INCORPORATED
- Current Assignee Address: US TX Dallas
- Agent Michael A. Davis, Jr.; Charles A. Brill; Frank D. Cimino
- Main IPC: B81C1/00
- IPC: B81C1/00 ; H01L23/08 ; H01L21/768

Abstract:
An illustrate method (and device) includes etching a cavity in a first substrate (e.g., a semiconductor wafer), forming a first metal layer on a first surface of the first substrate and in the cavity, and forming a second metal layer on a non-conductive structure (e.g., glass). The method also may include removing a portion of the second metal layer to form an iris to expose a portion of the non-conductive structure, forming a bond between the first metal layer and the second metal layer to thereby attach the non-conductive structure to the first substrate, sealing an interface between the non-conductive structure and the first substrate, and patterning an antenna on a surface of the non-conductive structure.
Public/Granted literature
- US20190071306A1 HERMETICALLY SEALED MOLECULAR SPECTROSCOPY CELL Public/Granted day:2019-03-07
Information query