公开(公告)号：US20250091857A1

公开(公告)日：2025-03-20

申请号：US18961732

申请日：2024-11-27

Applicant: Texas Instruments Incorporated

Inventor： Adam Joseph Fruehling

IPC: B81B3/00 ,  G02B26/08 ,  H01G5/01 ,  H01H1/00

Abstract: Described embodiments include a microelectromechanical system (MEMS) array comprising a first MEMS device that includes a first movable electrostatic plate elastically connected to a first structure, the first movable electrostatic plate having a first mass, a first fixed electrostatic plate, and a first drive circuit having a first drive output coupled to the first fixed electrostatic plate. There is a second MEMS device that includes a second movable electrostatic plate elastically connected to a second structure, the second movable electrostatic plate having a second mass that is different than the first mass, a second fixed electrostatic plate, and a second drive circuit having a second drive output coupled to the second fixed electrostatic plate.

公开(公告)号：US11834331B2

公开(公告)日：2023-12-05

申请号：US17514282

申请日：2021-10-29

Applicant: Texas Instruments Incorporated

Inventor： Scott Robert Summerfelt ,  Adam Joseph Fruehling

IPC: B81C1/00 ,  B81B7/00 ,  H01H45/02 ,  H01H1/00

CPC classification number: B81C1/00333 ,  B81B7/0077 ,  H01H45/02 ,  B81B2203/0315 ,  B81C2203/019 ,  B81C2203/0136 ,  H01H1/0036

Abstract: A micro-electromechanical system (MEMS) device includes a moveable element within a cavity. The MEMS device also includes a first layer over the cavity, the first layer having a first hole and a second hole. The first hole has a first diameter. The second hole has a second diameter. The second diameter is larger than the first diameter, and the second hole is farther from the moveable element than the first hole. The first hole is sealed with a first dielectric material. The second hole is sealed with a second dielectric material. The cavity filled with a gas at a pressure of at least approximately 10 torr.

公开(公告)号：US20230333514A1

公开(公告)日：2023-10-19

申请号：US18332789

申请日：2023-06-12

Applicant: Texas Instruments Incorporated

Inventor： Juan Alejandro Herbsommer ,  Argyrios Dellis ,  Adam Joseph Fruehling

IPC: G04F5/14 ,  H03L7/26 ,  H04B1/40

CPC classification number: G04F5/14 ,  H03L7/26 ,  H04B1/40

Abstract: In some examples, an apparatus comprises a substrate, an interposer mechanically coupled to the substrate, a gas cell on at least part of the interposer, and a plate on the gas cell and mechanically coupled to the interposer. Some examples of the apparatus are configured to be millimeter wave devices.

公开(公告)号：US10589986B2

公开(公告)日：2020-03-17

申请号：US15696245

申请日：2017-09-06

Applicant: TEXAS INSTRUMENTS INCORPORATED

Inventor： Adam Joseph Fruehling ,  Juan Alejandro Herbsommer ,  Simon Joshua Jacobs ,  Benjamin Stassen Cook ,  James F. Hallas ,  Randy Long

IPC: B81B7/00 ,  H03L7/26 ,  G01L7/08 ,  G04F5/14 ,  G01M3/32 ,  G01L9/00

Abstract: An electronic device includes a package substrate, a circuit assembly, and a housing. The circuit assembly is mounted on the package substrate. The circuit assembly includes a first sealed cavity formed in a device substrate. The housing is mounted on the package substrate to form a second sealed cavity about the circuit assembly.

公开(公告)号：US20190204788A1

公开(公告)日：2019-07-04

申请号：US16234499

申请日：2018-12-27

Applicant: Texas Instruments Incorporated

Inventor： Argyrios Dellis ,  Juan Alejandro Herbsommer ,  Adam Joseph Fruehling

IPC: G04F5/14 ,  H03L7/26 ,  H03B17/00

CPC classification number: G04F5/14 ,  H03B17/00 ,  H03L7/26

Abstract: A clock apparatus with a gas cell. The gas cell includes: (i) a first chamber including a sealed interior for providing a signal waveguide; and (ii) a second chamber, in fluid communication with the first chamber, and comprising apparatus for directing atoms having a selected velocity vector into the first chamber.

公开(公告)号：US20190179134A1

公开(公告)日：2019-06-13

申请号：US15836521

申请日：2017-12-08

Applicant: Texas Instruments Incorporated

Inventor： Adam Joseph Fruehling ,  James Norman Hall

IPC: G02B26/06 ,  G09G3/34 ,  G02B26/08

CPC classification number: G02B26/06 ,  B81B2201/04 ,  G02B26/0833 ,  G02B26/0841 ,  G09G3/3466

Abstract: In methods and apparatus for increasing efficiency and optical bandwidth of a microelectromechanical system piston-mode spatial light modulator, an example apparatus includes: an electrode with spring legs; a base electrode; a mirror displacement determiner to determine a periodic signal corresponding to a displacement distance of the electrode beyond an instability point of the electrode; and a voltage source to output a periodic voltage to the base electrode in response to the periodic signal. The periodic voltage causes the spring legs to vary displacement of the electrode with respect to the base electrode according to the periodic voltage. The displacement includes distances beyond the instability point.

公开(公告)号：US12140751B2

公开(公告)日：2024-11-12

申请号：US17114369

申请日：2020-12-07

Applicant: TEXAS INSTRUMENTS INCORPORATED

Inventor： Adam Joseph Fruehling ,  James Norman Hall

IPC: G02B26/08 ,  G02B26/06 ,  H02N1/00

Abstract: A phase light modulator includes a base plate, a mirror, a perforated hinge plate, and first second support posts. The perforated hinge plate supports the mirror. The perforated hinge plate has first and second flexural arms. The perforated hinge plate is configured to move toward or away from the base plate based on application of a potential difference between the base plate and the perforated hinge plate. The first flexural arm is connected to the first support posts, and the second flexural arm is connected to the second support post.

公开(公告)号：US20240045381A1

公开(公告)日：2024-02-08

申请号：US18491304

申请日：2023-10-20

Applicant: Texas Instruments Incorporated

Inventor： Juan Alejandro Herbsommer ,  Argyrios Dellis ,  Adam Joseph Fruehling

IPC: G04F5/14 ,  H03L7/26 ,  H03B17/00

CPC classification number: G04F5/14 ,  H03L7/26 ,  H03B17/00 ,  H01P5/16

Abstract: In an example, an apparatus comprises a sealed container containing a dipolar gas. The apparatus also comprises a first transmit antenna, a second transmit antenna, and a receive antenna each communicatively coupled to the sealed container. The apparatus also comprises a control circuit including a transceiver, the control circuit having a first transmit output, a second transmit output, and a receive input, the first transmit output coupled to the first transmit antenna, the second transmit output coupled to the second transmit antenna, and the receive input coupled to the receive antenna.

公开(公告)号：US11258154B2

公开(公告)日：2022-02-22

申请号：US16700476

申请日：2019-12-02

Applicant: TEXAS INSTRUMENTS INCORPORATED

Inventor： Adam Joseph Fruehling ,  Benjamin Stassen Cook ,  Juan Alejandro Herbsommer ,  Swaminathan Sankaran

IPC: H01P5/107 ,  H01P3/12 ,  H01P5/02 ,  H01P7/06 ,  G04F5/14 ,  H01P1/20 ,  H01Q15/00

Abstract: An apparatus includes a substrate containing a cavity and a dielectric structure covering at least a portion of the cavity. The cavity is hermetically sealed. The apparatus also may include a launch structure formed on the dielectric structure and outside the hermetically sealed cavity. The launch structure is configured to cause radio frequency (RF) energy flowing in a first direction to enter the hermetically sealed cavity through the dielectric structure in a direction orthogonal to the first direction.

公开(公告)号：US20210354977A1

公开(公告)日：2021-11-18

申请号：US17320188

申请日：2021-05-13

Applicant: Texas Instruments Incorporated

Inventor： Scott Robert Summerfelt ,  Adam Joseph Fruehling ,  Kelly Jay Taylor

IPC: B81B3/00

Abstract: In described examples, a microelectromechanical system (MEMS) is located on a substrate. A silicon nitride (SiN) layer on a portion of the substrate. A mechanical structure has first and second ends. The first end is embedded in the SiN layer, and the second end is cantilevered from the SiN layer.