Invention Grant
- Patent Title: Refillable ampoule with purge capability
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Application No.: US15134548Application Date: 2016-04-21
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Publication No.: US10551004B2Publication Date: 2020-02-04
- Inventor: Richard D. Chism , Andy Krell
- Applicant: Entegris, Inc.
- Applicant Address: US MA Billerica
- Assignee: ENTEGRIS, INC.
- Current Assignee: ENTEGRIS, INC.
- Current Assignee Address: US MA Billerica
- Agency: Entegris, Inc.
- Main IPC: C23C16/44
- IPC: C23C16/44 ; F17C13/04 ; H01L21/67 ; C23C16/448 ; C23C16/455 ; F17D1/04 ; C23C14/48 ; G03F7/20

Abstract:
A fluid delivery system adapted to isolate an ampoule and/or process line during purge, including an inlet control valve connecting a source of pressurized gas to a refillable ampoule, an outlet control valve connecting the refillable ampoule to a location of use, a process control valve connecting a process line to the refillable ampoule, a process isolation valve, and a purge supply valve, e.g., a three-way purge supply valve, arranged between the process isolation valve and the process control valve. A method of purging a fluid delivery system is also disclosed, including closing a process isolation valve, connecting a process line to a refillable ampoule, supplying a purge gas through a purge supply valve, e.g., a three-way purge supply valve, and cycling open and close at least once a process control valve coupled to the process line. A manifold for use in refilling an ampoule and purging a fluid supply system is also described.
Public/Granted literature
- US20160230933A1 REFILLABLE AMPOULE WITH PURGE CAPABILITY Public/Granted day:2016-08-11
Information query
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