公开(公告)号：US20150210430A1

公开(公告)日：2015-07-30

申请号：US14419458

申请日：2013-08-07

Applicant: ENTEGRIS, INC.

Inventor： Donn K. Naito ,  Andy Krell ,  Mitchell W. McFeron ,  Steven Jackson ,  Joel Robison

IPC: B65D25/14 ,  H01L21/67 ,  B65D85/00 ,  B65D25/38 ,  B65D43/02

CPC classification number: B65D25/14 ,  B01J4/00 ,  B01J19/02 ,  B01J2219/0245 ,  B65D25/38 ,  B65D43/02 ,  B65D85/70 ,  H01L21/67023

Abstract: A supply vessel for dispensing of ultra-high purity chemical reagents, comprising a metal container defining an enclosable interior volume including interior surface structure, wherein the interior surface structure is coated with an ultra-high purity effective polyperfluoroalkoxyethylene coating. Such supply vessel may for example be utilized for storage and dispensing of ultra-high purity chemical reagent to a semiconductor manufacturing tool, or a tool for manufacturing of flat-panel displays, or solar panels.

Abstract translation: 一种用于分配超高纯度化学试剂的供应容器，包括限定包含内表面结构的可封闭内部容积的金属容器，其中内表面结构涂覆有超高纯度有效的多氟全氟烷氧基涂层。 这种供应容器可以例如用于向半导体制造工具或用于制造平板显示器或太阳能电池板的工具的储存和分配超高纯度化学试剂。

公开(公告)号：US20160230933A1

公开(公告)日：2016-08-11

申请号：US15134548

申请日：2016-04-21

Applicant: Entegris, Inc.

Inventor： Richard D. Chism ,  Andy Krell

IPC: F17C13/04

CPC classification number: F17C13/04 ,  C23C14/48 ,  C23C16/44 ,  C23C16/4408 ,  C23C16/4482 ,  C23C16/45561 ,  F17C2205/0335 ,  F17D1/04 ,  G03F7/70 ,  H01L21/67017 ,  Y10T137/0318 ,  Y10T137/877

Abstract: A fluid delivery system adapted to isolate an ampoule and/or process line during purge, including an inlet control valve connecting a source of pressurized gas to a refillable ampoule, an outlet control valve connecting the refillable ampoule to a location of use, a process control valve connecting a process line to the refillable ampoule, a process isolation valve, and a purge supply valve, e.g., a three-way purge supply valve, arranged between the process isolation valve and the process control valve. A method of purging a fluid delivery system is also disclosed, including closing a process isolation valve, connecting a process line to a refillable ampoule, supplying a purge gas through a purge supply valve, e.g., a three-way purge supply valve, and cycling open and close at least once a process control valve coupled to the process line. A manifold for use in refilling an ampoule and purging a fluid supply system is also described.

Abstract translation: 流体输送系统，其适于在净化期间隔离安瓿和/或生产线，包括将加压气体源连接到可再填充的安瓿的入口控制阀，连接可再填充的安瓿与使用位置的出口控制阀，过程控制 将过程管线连接到可再填充安瓿的阀门，过程隔离阀和布置在过程隔离阀和过程控制阀之间的净化供给阀，例如三通净化供给阀。 还公开了一种清洗流体输送系统的方法，包括关闭过程隔离阀，将过程管线连接到可再填充的安瓿，通过净化供给阀（例如三通净化供给阀）和循环 打开和关闭至少一次与过程管线相连的过程控制阀。 还描述了用于重新灌注安瓿和清洗流体供应系统的歧管。

公开(公告)号：US10551004B2

公开(公告)日：2020-02-04

申请号：US15134548

申请日：2016-04-21

Applicant: Entegris, Inc.

Inventor： Richard D. Chism ,  Andy Krell

IPC: C23C16/44 ,  F17C13/04 ,  H01L21/67 ,  C23C16/448 ,  C23C16/455 ,  F17D1/04 ,  C23C14/48 ,  G03F7/20

Abstract: A fluid delivery system adapted to isolate an ampoule and/or process line during purge, including an inlet control valve connecting a source of pressurized gas to a refillable ampoule, an outlet control valve connecting the refillable ampoule to a location of use, a process control valve connecting a process line to the refillable ampoule, a process isolation valve, and a purge supply valve, e.g., a three-way purge supply valve, arranged between the process isolation valve and the process control valve. A method of purging a fluid delivery system is also disclosed, including closing a process isolation valve, connecting a process line to a refillable ampoule, supplying a purge gas through a purge supply valve, e.g., a three-way purge supply valve, and cycling open and close at least once a process control valve coupled to the process line. A manifold for use in refilling an ampoule and purging a fluid supply system is also described.