Invention Grant
- Patent Title: IR detector array device
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Application No.: US15009300Application Date: 2016-01-28
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Publication No.: US10551246B2Publication Date: 2020-02-04
- Inventor: Florin Udrea , Syed Zeeshan Ali , Richard Henry Hopper , Julian Gardner , Andrea De Luca
- Applicant: AMS Sensors UK Limited
- Applicant Address: GB Cambridgeshire
- Assignee: AMS SENSORS UK LIMITED
- Current Assignee: AMS SENSORS UK LIMITED
- Current Assignee Address: GB Cambridgeshire
- Agency: Tucker Ellis LLP
- Main IPC: G01J3/42
- IPC: G01J3/42 ; G01J3/28 ; H01L23/34 ; H01L27/144 ; H01L27/146 ; H01L27/16 ; H01L31/02 ; H01L31/0203 ; H01L31/0216 ; H01L31/0232 ; H01L31/028 ; H01L31/16 ; H01L31/18 ; H01L37/02

Abstract:
We disclose an array of Infra-Red (IR) detectors comprising at least one dielectric membrane formed on a semiconductor substrate comprising an etched portion; at least two IR detectors, and at least one patterned layer formed within or on one or both sides of the said dielectric membrane for controlling the IR absorption of at least one of the IR detectors. The patterned layer comprises laterally spaced structures.
Public/Granted literature
- US20170219434A1 IR DETECTOR ARRAY DEVICE Public/Granted day:2017-08-03
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