公开(公告)号：US09909926B2

公开(公告)日：2018-03-06

申请号：US15168562

申请日：2016-05-31

Applicant: AMS Sensors UK Limited

Inventor： Richard Henry Hopper ,  Andrea De Luca ,  Kaspars Ledins ,  Syed Zeeshan Ali ,  Mohamed Foysol Chowdhury

IPC: G01J5/14 ,  G01N21/61 ,  G01N33/00 ,  B01L3/00 ,  G01N21/552 ,  H01L31/16 ,  H01L31/0232 ,  H01L31/02 ,  H01L35/32 ,  H01L37/00 ,  H01L31/167 ,  H01L31/0203 ,  H01L31/18

CPC classification number: G01J5/14 ,  B01L3/502707 ,  B01L3/502715 ,  B01L3/50273 ,  B01L2200/12 ,  B01L2300/0654 ,  B01L2300/08 ,  B01L2300/0858 ,  B01L2300/0887 ,  B01L2300/168 ,  B01L2400/0424 ,  G01J5/0853 ,  G01N21/0303 ,  G01N21/3504 ,  G01N21/552 ,  G01N21/61 ,  G01N33/004 ,  G01N2201/068 ,  H01L31/02002 ,  H01L31/0203 ,  H01L31/02325 ,  H01L31/16 ,  H01L31/167 ,  H01L31/18 ,  H01L35/32 ,  H01L37/00

Abstract: We disclose a chemical sensing device for detecting a fluid. The sensing device comprises: at least one substrate region comprising at least one etched portion; a dielectric region formed on the at least one substrate region, the dielectric region comprising at least one dielectric membrane region adjacent to the at least one etched portion; an optical source for emitting an infra-red (IR) signal; an optical detector for detecting the IR signal emitted from the optical source; one or more further substrates formed on or under the dielectric region, said one or more further substrates defining an optical path for the IR signal to propagate from the optical source to the optical detector. At least one of the optical source and optical detector is formed in or on the dielectric membrane region.

公开(公告)号：US20200096396A1

公开(公告)日：2020-03-26

申请号：US16143323

申请日：2018-09-26

Applicant: AMS Sensors UK Limited

Inventor： Claudio Zuliani ,  Richard Henry Hopper ,  Florin Udrea ,  Andrea De Luca ,  James Eilertsen

IPC: G01K7/04

Abstract: We disclose herein a gas sensor comprising a catalyst material; a temperature detector configured to measure a change in temperature of the catalyst material; and a plurality of electrodes configured to measure the current and/or resistance of the catalytic material. The gas sensor can be formed using CMOS or CMOS-SOI technologies.

公开(公告)号：US10128302B2

公开(公告)日：2018-11-13

申请号：US15009410

申请日：2016-01-28

Applicant: AMS SENSORS UK LIMITED

Inventor： Florin Udrea ,  Syed Zeeshan Ali ,  Richard Henry Hopper ,  Julian Gardner ,  Andrea De Luca

IPC: H01L27/16 ,  H01L27/146 ,  H01L31/024 ,  H01L31/028 ,  H01L31/09 ,  H01L31/103 ,  H01L31/112 ,  H01L31/12 ,  H01L37/02 ,  G01J5/02 ,  G01J5/12 ,  G01J5/20

Abstract: We disclose herein a thermal IR detector array device comprising a dielectric membrane, supported by a substrate, the membrane having an array of IR detectors, where the array size is at least 3 by 3 or larger, and there are tracks embedded within the membrane layers to separate each element of the array, the tracks also acting as heatsinks and/or cold junction regions.

公开(公告)号：US20170221959A1

公开(公告)日：2017-08-03

申请号：US15009410

申请日：2016-01-28

Applicant: AMS SENSORS UK LIMITED

Inventor： Florin Udrea ,  Syed Zeeshan Ali ,  Richard Henry Hopper ,  Julian Gardner ,  Andrea De Luca

IPC: H01L27/146 ,  H01L27/16 ,  H01L31/024 ,  H01L31/112 ,  H01L31/028 ,  H01L31/09 ,  H01L31/103 ,  H01L37/02 ,  H01L31/12

CPC classification number: H01L27/14669 ,  G01J5/024 ,  G01J5/12 ,  G01J5/20 ,  G01J2005/123 ,  G01J2005/202 ,  H01L27/14603 ,  H01L27/14609 ,  H01L27/14612 ,  H01L27/14618 ,  H01L27/1462 ,  H01L27/14625 ,  H01L27/14629 ,  H01L27/1463 ,  H01L27/14649 ,  H01L27/14683 ,  H01L27/16 ,  H01L31/024 ,  H01L31/028 ,  H01L31/09 ,  H01L31/103 ,  H01L31/112 ,  H01L31/12 ,  H01L37/025

Abstract: We disclose herein a thermal IR detector array device comprising a dielectric membrane, supported by a substrate, the membrane having an array of IR detectors, where the array size is at least 3 by 3 or larger, and there are tracks embedded within the membrane layers to separate each element of the array, the tracks also acting as heatsinks and/or cold junction regions.

公开(公告)号：US20170219434A1

公开(公告)日：2017-08-03

申请号：US15009300

申请日：2016-01-28

Applicant: AMS Sensors UK Limited

Inventor： Florin Udrea ,  Syed Zeeshan Ali ,  Richard Henry Hopper ,  Julian Gardner ,  Andrea De Luca

IPC: G01J3/42 ,  H01L27/16 ,  H01L37/02 ,  H01L31/028 ,  H01L23/34 ,  G01J3/28 ,  H01L27/144 ,  H01L31/02 ,  H01L31/0203 ,  H01L31/0216 ,  H01L31/0232 ,  H01L31/18 ,  H01L27/146 ,  H01L31/16

CPC classification number: G01J3/42 ,  G01J3/2803 ,  G01J5/024 ,  G01J5/0853 ,  G01J5/12 ,  G01J5/20 ,  G01J2005/123 ,  G01J2005/202 ,  H01L23/34 ,  H01L27/1446 ,  H01L27/14607 ,  H01L27/14609 ,  H01L27/14618 ,  H01L27/1462 ,  H01L27/14625 ,  H01L27/14629 ,  H01L27/14634 ,  H01L27/14636 ,  H01L27/14649 ,  H01L27/14669 ,  H01L27/14683 ,  H01L27/16 ,  H01L31/02002 ,  H01L31/0203 ,  H01L31/0216 ,  H01L31/02327 ,  H01L31/028 ,  H01L31/16 ,  H01L31/1804 ,  H01L37/025

Abstract: We disclose an array of Infra-Red (IR) detectors comprising at least one dielectric membrane formed on a semiconductor substrate comprising an etched portion; at least two IR detectors, and at least one patterned layer formed within or on one or both sides of the said dielectric membrane for controlling the IR absorption of at least one of the IR detectors. The patterned layer comprises laterally spaced structures.

公开(公告)号：US10883804B2

公开(公告)日：2021-01-05

申请号：US15852225

申请日：2017-12-22

Applicant: AMS Sensors UK Limited

Inventor： Florin Udrea ,  Syed Zeeshan Ali ,  Richard Henry Hopper

IPC: F41J2/02 ,  H01K1/02 ,  G01J5/52 ,  G01J5/02 ,  G01J3/10 ,  G01J5/08

Abstract: We disclose herein an infra-red (IR) device comprising a substrate comprising an etched cavity portion and a substrate portion; a dielectric layer disposed on the substrate. The dielectric layer comprises a dielectric membrane which is adjacent, or directly above, or below the etched cavity portion of the substrate. The device further comprises a reflective layer on or in or above or below the dielectric membrane to enhance emission or absorption of infrared light at one or more wavelengths.

公开(公告)号：US10551246B2

公开(公告)日：2020-02-04

申请号：US15009300

申请日：2016-01-28

Applicant: AMS Sensors UK Limited

Inventor： Florin Udrea ,  Syed Zeeshan Ali ,  Richard Henry Hopper ,  Julian Gardner ,  Andrea De Luca

IPC: G01J3/42 ,  G01J3/28 ,  H01L23/34 ,  H01L27/144 ,  H01L27/146 ,  H01L27/16 ,  H01L31/02 ,  H01L31/0203 ,  H01L31/0216 ,  H01L31/0232 ,  H01L31/028 ,  H01L31/16 ,  H01L31/18 ,  H01L37/02

Abstract: We disclose an array of Infra-Red (IR) detectors comprising at least one dielectric membrane formed on a semiconductor substrate comprising an etched portion; at least two IR detectors, and at least one patterned layer formed within or on one or both sides of the said dielectric membrane for controlling the IR absorption of at least one of the IR detectors. The patterned layer comprises laterally spaced structures.

公开(公告)号：US20190198487A1

公开(公告)日：2019-06-27

申请号：US15852257

申请日：2017-12-22

Applicant: AMS Sensors UK Limited

Inventor： Florin Udrea ,  Syed Zeeshan Ali ,  Richard Henry Hopper ,  Rainer Minixhofer

IPC: H01L25/16 ,  H01L23/13 ,  H01L23/26 ,  H01L23/48 ,  H01L35/10 ,  H01L35/02 ,  H01L35/32 ,  H01L35/08 ,  H01L35/34 ,  H05B3/36

CPC classification number: H01L25/165 ,  G01J5/0225 ,  G01J5/024 ,  G01J5/045 ,  G01J5/0815 ,  H01L21/78 ,  H01L23/13 ,  H01L23/26 ,  H01L23/481 ,  H01L24/11 ,  H01L24/13 ,  H01L24/48 ,  H01L35/02 ,  H01L35/08 ,  H01L35/10 ,  H01L35/32 ,  H01L35/34 ,  H01L2224/13025 ,  H01L2224/4845 ,  H05B3/36

Abstract: We disclose an Infrared (IR) device comprising a first substrate comprising a first cavity; a dielectric layer disposed on the first substrate; a second substrate disposed on the dielectric layer and on the opposite side of the first substrate, the second substrate having a second cavity. The device further comprises an optically transmissive layer attached to one of the first and second substrates; a further layer provided to another of the first and second substrates so that the IR device is substantially closed. Holes are provided through the dielectric layer so that a pressure in the first cavity is substantially the same level as a pressure in the second cavity.

公开(公告)号：US20170343419A1

公开(公告)日：2017-11-30

申请号：US15168562

申请日：2016-05-31

Applicant: AMS Sensors UK Limited

Inventor： Richard Henry Hopper ,  Andrea De Luca ,  Kaspars Ledins ,  Syed Zeeshan Ali ,  Mohamed Foysol Chowdhury

IPC: G01J5/14 ,  B01L3/00 ,  H01L31/18 ,  H01L31/167 ,  H01L31/16 ,  G01N33/00 ,  H01L31/0203 ,  H01L31/02 ,  H01L35/32 ,  G01N21/552 ,  G01N21/61 ,  H01L37/00 ,  H01L31/0232

CPC classification number: G01J5/14 ,  B01L3/502707 ,  B01L3/502715 ,  B01L3/50273 ,  B01L2200/12 ,  B01L2300/0654 ,  B01L2300/08 ,  B01L2300/0858 ,  B01L2300/0887 ,  B01L2300/168 ,  B01L2400/0424 ,  G01J5/0853 ,  G01N21/0303 ,  G01N21/3504 ,  G01N21/552 ,  G01N21/61 ,  G01N33/004 ,  G01N2201/068 ,  H01L31/02002 ,  H01L31/0203 ,  H01L31/02325 ,  H01L31/16 ,  H01L31/167 ,  H01L31/18 ,  H01L35/32 ,  H01L37/00

Abstract: We disclose a chemical sensing device for detecting a fluid. The sensing device comprises: at least one substrate region comprising at least one etched portion; a dielectric region formed on the at least one substrate region, the dielectric region comprising at least one dielectric membrane region adjacent to the at least one etched portion; an optical source for emitting an infra-red (IR) signal; an optical detector for detecting the IR signal emitted from the optical source; one or more further substrates formed on or under the dielectric region, said one or more further substrates defining an optical path for the IR signal to propagate from the optical source to the optical detector. At least one of the optical source and optical detector is formed in or on the dielectric membrane region.