Invention Grant
- Patent Title: Capping structure
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Application No.: US15876407Application Date: 2018-01-22
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Publication No.: US10559470B2Publication Date: 2020-02-11
- Inventor: Haigou Huang , Jinsheng Gao , Hong Yu , Jinping Liu , Huang Liu
- Applicant: GLOBALFOUNDRIES INC.
- Applicant Address: KY Grand Cayman
- Assignee: GLOBALFOUNDRIES INC.
- Current Assignee: GLOBALFOUNDRIES INC.
- Current Assignee Address: KY Grand Cayman
- Agency: Roberts Mlotkowski Safran Cole & Calderon, P.C.
- Agent Francois Pagette; Andrew M. Calderon
- Main IPC: H01L27/08
- IPC: H01L27/08 ; H01L21/28 ; H01L21/76 ; H01L21/8234 ; H01L27/088 ; H01L21/311 ; H01L21/768

Abstract:
The present disclosure relates to semiconductor structures and, more particularly, to capping structures and methods of manufacture. The structure includes: a plurality of gate structures in a first location with a first density; a plurality of gate structures in a second location with a second density different than the first density; and a T-shaped capping structure protecting the plurality of gate structures in the first location and in the second location.
Public/Granted literature
- US20190228976A1 CAPPING STRUCTURE Public/Granted day:2019-07-25
Information query
IPC分类: