发明授权
- 专利标题: Capping structure
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申请号: US15876407申请日: 2018-01-22
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公开(公告)号: US10559470B2公开(公告)日: 2020-02-11
- 发明人: Haigou Huang , Jinsheng Gao , Hong Yu , Jinping Liu , Huang Liu
- 申请人: GLOBALFOUNDRIES INC.
- 申请人地址: KY Grand Cayman
- 专利权人: GLOBALFOUNDRIES INC.
- 当前专利权人: GLOBALFOUNDRIES INC.
- 当前专利权人地址: KY Grand Cayman
- 代理机构: Roberts Mlotkowski Safran Cole & Calderon, P.C.
- 代理商 Francois Pagette; Andrew M. Calderon
- 主分类号: H01L27/08
- IPC分类号: H01L27/08 ; H01L21/28 ; H01L21/76 ; H01L21/8234 ; H01L27/088 ; H01L21/311 ; H01L21/768
摘要:
The present disclosure relates to semiconductor structures and, more particularly, to capping structures and methods of manufacture. The structure includes: a plurality of gate structures in a first location with a first density; a plurality of gate structures in a second location with a second density different than the first density; and a T-shaped capping structure protecting the plurality of gate structures in the first location and in the second location.
公开/授权文献
- US20190228976A1 CAPPING STRUCTURE 公开/授权日:2019-07-25
信息查询
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