Invention Grant
- Patent Title: On-chip resistors with direct wiring connections
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Application No.: US15834443Application Date: 2017-12-07
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Publication No.: US10566411B2Publication Date: 2020-02-18
- Inventor: Atsushi Ogino , Lin Hu , Brian Greene
- Applicant: GLOBALFOUNDRIES Inc.
- Applicant Address: KY Grand Cayman
- Assignee: GLOBALFOUNDRIES INC.
- Current Assignee: GLOBALFOUNDRIES INC.
- Current Assignee Address: KY Grand Cayman
- Agency: Thompson Hine LLP
- Agent Anthony Canale
- Main IPC: H01L49/02
- IPC: H01L49/02 ; H01L23/522 ; H01L23/528 ; H01L27/06 ; H01L23/532 ; H01L21/3105 ; H01L21/8234 ; H01L21/311 ; H01L21/768
Abstract:
Device structures and fabrication methods for an on-chip resistor. A resistor body is formed on an interlayer dielectric layer of a contact level. A contact is formed that extends vertically through the interlayer dielectric layer. One or more dielectric layers are formed over the contact level, and a metal feature is formed in the one or more dielectric layers. The metal feature is at least in part in direct contact with a portion of the resistor body.
Public/Granted literature
- US20190181215A1 ON-CHIP RESISTORS WITH DIRECT WIRING CONNECTIONS Public/Granted day:2019-06-13
Information query
IPC分类:
