发明授权
- 专利标题: Support assembly
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申请号: US13457421申请日: 2012-04-26
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公开(公告)号: US10593539B2公开(公告)日: 2020-03-17
- 发明人: Chien-Teh Kao , Joel M. Huston , Mei Chang , Xiaoxiong (John) Yuan
- 申请人: Chien-Teh Kao , Joel M. Huston , Mei Chang , Xiaoxiong (John) Yuan
- 申请人地址: US CA Santa Clara
- 专利权人: APPLIED MATERIALS, INC.
- 当前专利权人: APPLIED MATERIALS, INC.
- 当前专利权人地址: US CA Santa Clara
- 代理机构: Patterson + Sheridan LLP
- 主分类号: B23K10/00
- IPC分类号: B23K10/00 ; H01L21/02 ; H01J37/32 ; H01L21/67 ; C23C14/54 ; C23C14/50 ; C23C14/02
摘要:
A method and apparatus for removing native oxides from a substrate surface is provided. In one aspect, the apparatus comprises a support assembly. In one embodiment, the support assembly includes a shaft coupled to a disk-shaped body. The disk-shaped body includes an upper surface, a lower surface and a cylindrical outer surface. A flange extends radially outward from the cylindrical outer surface. A fluid channel is formed in the disk-shaped body and is coupled to the heat transfer fluid conduit of the shaft. A plurality of grooves formed in the upper surface are coupled by a hole to the vacuum conduit of the shaft. A gas conduit formed through the disk-shaped body couples the gas conduit of the shaft to the cylindrical outer surface of the disk-shaped body.
公开/授权文献
- US20120267346A1 SUPPORT ASSEMBLY 公开/授权日:2012-10-25
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