Invention Grant
- Patent Title: Contact structures
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Application No.: US15914547Application Date: 2018-03-07
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Publication No.: US10593599B2Publication Date: 2020-03-17
- Inventor: Chanro Park , Stan Tsai
- Applicant: GLOBALFOUNDRIES INC.
- Applicant Address: KY Grand Cayman
- Assignee: GLOBALFOUNDRIES INC.
- Current Assignee: GLOBALFOUNDRIES INC.
- Current Assignee Address: KY Grand Cayman
- Agency: Roberts Calderon Safran & Cole, P.C.
- Agent Francois Pagette; Andrew M. Calderon
- Main IPC: H01L21/8234
- IPC: H01L21/8234 ; H01L21/768 ; H01L21/311 ; H01L21/321 ; H01L27/088 ; H01L29/45 ; H01L29/06 ; H01L21/285 ; H01L29/08 ; H01L29/417 ; H01L29/66

Abstract:
The present disclosure relates to semiconductor structures and, more particularly, to contact structures and methods of manufacture. The method includes: recessing an isolation region between adjacent gate structures and below metallization overburden of source/drain metallization; planarizing the metallization overburden to a level of the adjacent gate structures; and forming source/drain contacts to the source/drain metallization, on sides of and extending above the adjacent gate structures.
Public/Granted literature
- US20190279910A1 CONTACT STRUCTURES Public/Granted day:2019-09-12
Information query
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