Invention Grant
- Patent Title: Wiring-buried glass substrate, and inertial sensor element and inertial sensor using same
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Application No.: US15577011Application Date: 2016-06-22
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Publication No.: US10609817B2Publication Date: 2020-03-31
- Inventor: Ryosuke Meshii , Kazuo Goda , Takahiro Shinohara , Takanori Aoyagi , Kensaku Yamamoto , Hitoshi Yoshida
- Applicant: Panasonic Intellectual Property Management Co. Ltd.
- Applicant Address: JP Osaka
- Assignee: PANASONIC INTELLECTUAL PROPERTY MANAGEMENT CO., LTD.
- Current Assignee: PANASONIC INTELLECTUAL PROPERTY MANAGEMENT CO., LTD.
- Current Assignee Address: JP Osaka
- Agency: McDermott Will & Emery LLP
- Priority: JP2015-140992 20150715
- International Application: PCT/JP2016/003006 WO 20160622
- International Announcement: WO2017/010050 WO 20170119
- Main IPC: H05K1/02
- IPC: H05K1/02 ; G01P15/125 ; G01P15/08 ; B81B7/00 ; H05K1/03 ; G01P1/00

Abstract:
A wiring-buried glass substrate includes a glass substrate and a first wiring. The glass substrate includes a first surface, a second surface perpendicular to the first surface, and a third surface facing the first surface. The first wiring includes a first pillar portion and a first beam portion. The first pillar portion extends in a first direction perpendicular to the first surface of the glass substrate. The first beam portion is connected to a first surface of the first pillar portion and extends to a second direction perpendicular to a second surface of the glass substrate. The first wiring is buried in the glass substrate. The first surface of the first beam portion is exposed from a third surface of the glass substrate.
Public/Granted literature
- US20180168034A1 WIRING-BURIED GLASS SUBSTRATE, AND INERTIAL SENSOR ELEMENT AND INERTIAL SENSOR USING SAME Public/Granted day:2018-06-14
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