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公开(公告)号:US10649000B2
公开(公告)日:2020-05-12
申请号:US15760615
申请日:2016-11-02
Inventor: Takahiro Shinohara , Hitoshi Yoshida , Kazuo Goda , Rie Okamoto , Hiroshi Nakatsuka , Masako Yamaguchi , Hideki Ueda , Takanori Aoyagi , Yuki Maegawa , Takuya Kajiwara , Keisuke Kuroda , Takeshi Mori
IPC: G01P15/08 , G01P15/125 , G01P15/18 , H01L29/84
Abstract: A connection assembly includes a sensor substrate, a layer substrate coupled to the sensor substrate so as to face an upper surface of the sensor substrate, and a wire connected between the sensor substrate and the layer substrate. The sensor substrate includes first and second projections provide on the upper surface of the sensor substrate and extending in an extension direction along the upper surface of the sensor substrate. The wire has a first end sandwiched between the layer substrate and the first projection, and a second end sandwiched between the layer substrate and the second projection. The connection assembly provides reliable connection.
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公开(公告)号:US10609817B2
公开(公告)日:2020-03-31
申请号:US15577011
申请日:2016-06-22
Inventor: Ryosuke Meshii , Kazuo Goda , Takahiro Shinohara , Takanori Aoyagi , Kensaku Yamamoto , Hitoshi Yoshida
Abstract: A wiring-buried glass substrate includes a glass substrate and a first wiring. The glass substrate includes a first surface, a second surface perpendicular to the first surface, and a third surface facing the first surface. The first wiring includes a first pillar portion and a first beam portion. The first pillar portion extends in a first direction perpendicular to the first surface of the glass substrate. The first beam portion is connected to a first surface of the first pillar portion and extends to a second direction perpendicular to a second surface of the glass substrate. The first wiring is buried in the glass substrate. The first surface of the first beam portion is exposed from a third surface of the glass substrate.
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公开(公告)号:US10088497B2
公开(公告)日:2018-10-02
申请号:US15073645
申请日:2016-03-18
Inventor: Takeshi Mori , Keisuke Kuroda , Hitoshi Yoshida , Kazuo Goda , Takumi Taura , Hideki Ueda
IPC: G01P21/00 , G01P15/08 , G01P15/125 , G01P15/18
Abstract: An acceleration sensor includes a CV conversion circuit, an AD conversion circuit, and first and second registers. The CV conversion circuit outputs a voltage corresponding to the capacitance changes between a movable electrode and each of first and second fixed electrodes disposed to face the movable electrode. The AD conversion circuit is connected to the CV conversion circuit and has a first detection range and a second detection range. The first register is connected to the AD conversion circuit and holds a first value. The second register is connected to the AD conversion circuit and holds a second value. The first value contains information about an acceleration in the first detection range, and the second value contains information about an acceleration in the second detection range. The first and second values indicate accelerations in the same direction.
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公开(公告)号:US10126322B2
公开(公告)日:2018-11-13
申请号:US15617777
申请日:2017-06-08
Inventor: Hitoshi Yoshida , Nobuyuki Ibara , Hideki Ueda , Takeshi Okada , Takeshi Mori , Masatoshi Nomura , Katsumi Kakimoto , Yuji Suzuki
IPC: G01P15/125 , G01P15/08 , G01P15/18
Abstract: An acceleration sensor includes a weight portion having a recess section and a solid section, beam portions, a movable electrode provided on the opposite surface of the weight portion from an open surface of the recess section to extend over the recess section and the solid section, a first fixed electrode arranged at the opposite side of the movable electrode from the recess section, and a second fixed electrode arranged at the opposite side of the movable electrode from the solid section. The acceleration sensor detects acceleration using a change in capacitance between the movable electrode and the fixed electrodes caused by rotation of the weight portion. The beam portions are shifted toward the recess section such that an angle between a perpendicular line extending from a gravity center position of the weight portion to the rotation axis and a surface of the movable electrode becomes equal to 45 degrees.
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公开(公告)号:US09702895B2
公开(公告)日:2017-07-11
申请号:US14874845
申请日:2015-10-05
Inventor: Hitoshi Yoshida , Nobuyuki Ibara , Hideki Ueda , Takeshi Okada , Takeshi Mori , Masatoshi Nomura , Katsumi Kakimoto , Yuji Suzuki
IPC: G01P15/125 , G01P15/08 , G01P15/18
CPC classification number: G01P15/125 , G01P15/0802 , G01P15/18 , G01P2015/0831
Abstract: An acceleration sensor includes a weight portion having a recess section and a solid section, beam portions, a movable electrode provided on the opposite surface of the weight portion from an open surface of the recess section to extend over the recess section and the solid section, a first fixed electrode arranged at the opposite side of the movable electrode from the recess section, and a second fixed electrode arranged at the opposite side of the movable electrode from the solid section. The acceleration sensor detects acceleration using a change in capacitance between the movable electrode and the fixed electrodes caused by rotation of the weight portion. The beam portions are shifted toward the recess section such that an angle between a perpendicular line extending from a gravity center position of the weight portion to the rotation axis and a surface of the movable electrode becomes equal to 45 degrees.
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