Abstract:
An angular velocity sensor element includes a fixing part, an extension part, a twisted extension part, a drive vibrator, a detection vibrator, and a counter beam. The extension part has a first end coupled to the fixing part, and a second end. The twisted extension part has a first end coupled to the second end of the extension part, and a second end. The drive vibrator has a first end coupled to the second end of the twisted extension part, and a second end. The drive vibrator is provided with a drive electrode. The detection vibrator is coupled to the second end of the drive vibrator, and is provided with a first detection electrode. The counter beam is coupled to the second end of the twisted extension part, disposed substantially parallel to the drive vibrator, and configured to vibrate in a direction opposite to a vibration direction of the drive vibrator.
Abstract:
A sensor includes a sensor element, defined in an XY plane, including a first member, a second member having a first portion extending from the first member in a positive Y axis direction, a second portion extending from the first portion in a positive X axis direction and a third portion extending from the second portion in a negative Y axis direction, and a third member having a first section and a second section having a rectangular shape in a top view respectively. The first portion, the second portion and the third portion extend along a periphery of the first section in the top view respectively. The second section is connected to the third portion and extends from the first section in a positive Y axis direction. A length of the second member is larger than a length of the third member in a positive X axis direction.
Abstract:
An angular velocity detection device includes an outer frame including fixed portions, outer beam portions connected to the fixed portions, a sensing part surrounded by the outer frame with first slit therebetween, and a joint connecting the outer frame and the sensing part. The sensing part includes an inner beam portion, a flexible portion, and a detector. The inner beam portion has a hollow region inside and is square-shaped when viewed from above. The flexible portion is formed in the hollow region of the inner beam portion, and is connected to the inner edge of the inner beam portion. The detector is disposed in the flexible portion. The first slit is formed to surround the sensing part excluding the joint.
Abstract:
A wiring-buried glass substrate includes a glass substrate and a first wiring. The glass substrate includes a first surface, a second surface perpendicular to the first surface, and a third surface facing the first surface. The first wiring includes a first pillar portion and a first beam portion. The first pillar portion extends in a first direction perpendicular to the first surface of the glass substrate. The first beam portion is connected to a first surface of the first pillar portion and extends to a second direction perpendicular to a second surface of the glass substrate. The first wiring is buried in the glass substrate. The first surface of the first beam portion is exposed from a third surface of the glass substrate.
Abstract:
An angular velocity detection device includes an outer frame including fixed portions, outer beam portions connected to the fixed portions, a sensing part surrounded by the outer frame with first slit therebetween, and a joint connecting the outer frame and the sensing part. The sensing part includes an inner beam portion, a flexible portion, and a detector. The inner beam portion has a hollow region inside and is square-shaped when viewed from above. The flexible portion is formed in the hollow region of the inner beam portion, and is connected to the inner edge of the inner beam portion. The detector is disposed in the flexible portion. The first slit is formed to surround the sensing part excluding the joint.
Abstract:
An inertial force sensor that can suppress fluctuation of detection sensitivity even if an external stress is applied to the inertial force sensor. Angular velocity sensor (1), that is, an inertial force sensor includes ceramic substrate (6), lower lid (4) adhering to ceramic substrate (6) with adhesives (11a and 11b) (first adhesives), and sensor element (2) adhering to lower lid (4) with adhesives (10a and 10b) (second adhesives). The elastic moduli of adhesives (11a and 11b) are smaller than those of adhesives (10a and 10b).
Abstract:
An inertial force sensor that can suppress fluctuation of detection sensitivity even if an external stress is applied to the inertial force sensor. Angular velocity sensor (1), that is, an inertial force sensor includes ceramic substrate (6), lower lid (4) adhering to ceramic substrate (6) with adhesives (11a and 11b) (first adhesives), and sensor element (2) adhering to lower lid (4) with adhesives (10a and 10b) (second adhesives). The elastic moduli of adhesives (11a and 11b) are smaller than those of adhesives (10a and 10b).
Abstract:
A sensor includes a sensor element, defined in an XY plane, including a first member, a second member having a first portion extending from the first member in a positive Y axis direction, a second portion extending from the first portion in a positive X axis direction and a third portion extending from the second portion in a negative Y axis direction, and a third member having a first section and a second section having a rectangular shape in a top view respectively. The first portion, the second portion and the third portion extend along a periphery of the first section in the top view respectively. The second section is connected to the third portion and extends from the first section in a positive Y axis direction. A length of the second member is larger than a length of the third member in a positive X axis direction.