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公开(公告)号：US10145685B2
公开(公告)日：2018-12-04
申请号：US15098818
申请日：2016-04-14
Inventor： Kensaku Yamamoto
IPC: G01C19/5663 , G01C19/5607 , G01C19/56 , G01C19/5628 , G01C19/5747
Abstract: An angular velocity sensor element includes a fixing part, an extension part, a twisted extension part, a drive vibrator, a detection vibrator, and a counter beam. The extension part has a first end coupled to the fixing part, and a second end. The twisted extension part has a first end coupled to the second end of the extension part, and a second end. The drive vibrator has a first end coupled to the second end of the twisted extension part, and a second end. The drive vibrator is provided with a drive electrode. The detection vibrator is coupled to the second end of the drive vibrator, and is provided with a first detection electrode. The counter beam is coupled to the second end of the twisted extension part, disposed substantially parallel to the drive vibrator, and configured to vibrate in a direction opposite to a vibration direction of the drive vibrator.
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公开(公告)号：US20160195395A1
公开(公告)日：2016-07-07
申请号：US15058374
申请日：2016-03-02
Inventor： Tsuyoshi Fujii , Kensaku Yamamoto
IPC: G01C19/5719
CPC classification number: G01C19/5719 , G01C19/56 , G01C19/5607 , G01C19/574 , H01L41/1132
Abstract: A sensor includes a sensor element, defined in an XY plane, including a first member, a second member having a first portion extending from the first member in a positive Y axis direction, a second portion extending from the first portion in a positive X axis direction and a third portion extending from the second portion in a negative Y axis direction, and a third member having a first section and a second section having a rectangular shape in a top view respectively. The first portion, the second portion and the third portion extend along a periphery of the first section in the top view respectively. The second section is connected to the third portion and extends from the first section in a positive Y axis direction. A length of the second member is larger than a length of the third member in a positive X axis direction.
Abstract translation: 传感器包括限定在XY平面中的传感器元件，包括第一构件，第二构件，具有从第一构件在正Y轴方向上延伸的第一部分，第二部分从正X轴从第一部分延伸 方向和从第二部分延伸到负Y轴方向的第三部分，以及分别具有第一部分和第二部分的顶部视图中的矩形形状的第三部件。 第一部分，第二部分和第三部分分别在顶视图中沿着第一部分的周边延伸。 第二部分连接到第三部分并且沿着Y轴方向从第一部分延伸。 第二构件的长度比正X轴方向上的第三构件的长度大。
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3.发明申请ANGULAR VELOCITY DETECTION DEVICE AND ANGULAR VELOCITY SENSOR INCLUDING THE SAME 审中-公开角速度检测装置和包括其的角速度传感器公开(公告)号：US20150204897A1
公开(公告)日：2015-07-23
申请号：US14676330
申请日：2015-04-01
Inventor： Kensaku Yamamoto
IPC: G01P3/02 , G01C19/5733
CPC classification number: G01P3/02 , G01C19/5719 , G01C19/5733 , G01P15/123 , G01P15/125 , G01P15/18 , G01P2015/0842
Abstract: An angular velocity detection device includes an outer frame including fixed portions, outer beam portions connected to the fixed portions, a sensing part surrounded by the outer frame with first slit therebetween, and a joint connecting the outer frame and the sensing part. The sensing part includes an inner beam portion, a flexible portion, and a detector. The inner beam portion has a hollow region inside and is square-shaped when viewed from above. The flexible portion is formed in the hollow region of the inner beam portion, and is connected to the inner edge of the inner beam portion. The detector is disposed in the flexible portion. The first slit is formed to surround the sensing part excluding the joint.
Abstract translation: 角速度检测装置包括：外框，包括固定部分，连接到固定部分的外光束部分;由外框包围的感测部分，其间具有第一狭缝;以及连接外框和感测部分的接合部。 感测部分包括内梁部分，柔性部分和检测器。 内梁部分具有内部的中空区域，并且当从上方观察时为正方形。 柔性部分形成在内梁部分的中空区域中，并且连接到内梁部分的内边缘。 检测器设置在柔性部分中。 第一狭缝被形成为围绕除了接头之外的感测部分。
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Patent Agency Ranking
4.发明授权公开(公告)号：US10609817B2
公开(公告)日：2020-03-31
申请号：US15577011
申请日：2016-06-22
Inventor： Ryosuke Meshii , Kazuo Goda , Takahiro Shinohara , Takanori Aoyagi , Kensaku Yamamoto , Hitoshi Yoshida
Abstract: A wiring-buried glass substrate includes a glass substrate and a first wiring. The glass substrate includes a first surface, a second surface perpendicular to the first surface, and a third surface facing the first surface. The first wiring includes a first pillar portion and a first beam portion. The first pillar portion extends in a first direction perpendicular to the first surface of the glass substrate. The first beam portion is connected to a first surface of the first pillar portion and extends to a second direction perpendicular to a second surface of the glass substrate. The first wiring is buried in the glass substrate. The first surface of the first beam portion is exposed from a third surface of the glass substrate.
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公开(公告)号：US09835641B2
公开(公告)日：2017-12-05
申请号：US14676330
申请日：2015-04-01
Inventor： Kensaku Yamamoto
IPC: G01C19/56 , G01P3/02 , G01C19/5719 , G01C19/5733 , G01P15/12 , G01P15/125 , G01P15/18 , G01P15/08
CPC classification number: G01P3/02 , G01C19/5719 , G01C19/5733 , G01P15/123 , G01P15/125 , G01P15/18 , G01P2015/0842
Abstract: An angular velocity detection device includes an outer frame including fixed portions, outer beam portions connected to the fixed portions, a sensing part surrounded by the outer frame with first slit therebetween, and a joint connecting the outer frame and the sensing part. The sensing part includes an inner beam portion, a flexible portion, and a detector. The inner beam portion has a hollow region inside and is square-shaped when viewed from above. The flexible portion is formed in the hollow region of the inner beam portion, and is connected to the inner edge of the inner beam portion. The detector is disposed in the flexible portion. The first slit is formed to surround the sensing part excluding the joint.
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公开(公告)号：US20170176186A1
公开(公告)日：2017-06-22
申请号：US15454220
申请日：2017-03-09
Inventor： Shigehiro Yoshiuchi , Satoshi Ohuchi , Tsuyoshi Fujii , Kensaku Yamamoto , Hideo Ohkoshi
IPC: G01C19/5769 , B81B7/00
CPC classification number: G01C19/5769 , B81B7/0048 , B81B2201/0242 , B81B2201/025 , B81B2203/0118 , B81B2203/0315 , B81B2207/07 , B81C1/0023 , B81C1/00238 , G01P15/0802 , H01L24/32 , H01L41/1132 , H01L2224/32145 , H01L2224/48091 , H01L2224/48227 , H01L2224/73265 , H01L2225/06506 , H01L2924/01014 , H01L2924/01079 , H01L2924/14 , H01L2924/00014
Abstract: An inertial force sensor that can suppress fluctuation of detection sensitivity even if an external stress is applied to the inertial force sensor. Angular velocity sensor (1), that is, an inertial force sensor includes ceramic substrate (6), lower lid (4) adhering to ceramic substrate (6) with adhesives (11a and 11b) (first adhesives), and sensor element (2) adhering to lower lid (4) with adhesives (10a and 10b) (second adhesives). The elastic moduli of adhesives (11a and 11b) are smaller than those of adhesives (10a and 10b).
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公开(公告)号：US20150192602A1
公开(公告)日：2015-07-09
申请号：US14660353
申请日：2015-03-17
Inventor： Shigehiro Yoshiuchi , Satoshi Ohuchi , Tsuyoshi Fujii , Kensaku Yamamoto , Hideo Ohkoshi
IPC: G01P15/08
CPC classification number: G01C19/5769 , B81B7/0048 , B81B2201/0242 , B81B2201/025 , B81B2203/0118 , B81B2203/0315 , B81B2207/07 , B81C1/0023 , B81C1/00238 , G01P15/0802 , H01L24/32 , H01L41/1132 , H01L2224/32145 , H01L2224/48091 , H01L2224/48227 , H01L2224/73265 , H01L2225/06506 , H01L2924/01014 , H01L2924/01079 , H01L2924/14 , H01L2924/00014
Abstract: An inertial force sensor that can suppress fluctuation of detection sensitivity even if an external stress is applied to the inertial force sensor. Angular velocity sensor (1), that is, an inertial force sensor includes ceramic substrate (6), lower lid (4) adhering to ceramic substrate (6) with adhesives (11a and 11b) (first adhesives), and sensor element (2) adhering to lower lid (4) with adhesives (10a and 10b) (second adhesives). The elastic moduli of adhesives (11a and 11b) are smaller than those of adhesives (10a and 10b).
Abstract translation: 即使向惯性力传感器施加外部应力也能够抑制检测灵敏度的波动的惯性力传感器。 角速度传感器（1）即惯性力传感器包括陶瓷基板（6），粘合剂（11a和11b）（第一粘合剂）和传感器元件（2）附着在陶瓷基板（6）上的下盖 ）用粘合剂（10a和10b）（第二粘合剂）粘附到下盖（4）上。 粘合剂（11a和11b）的弹性模量小于粘合剂（10a和10b）的弹性模量。
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公开(公告)号：US10119821B2
公开(公告)日：2018-11-06
申请号：US15058374
申请日：2016-03-02
Inventor： Tsuyoshi Fujii , Kensaku Yamamoto
IPC: G01C19/56 , G01C19/574 , G01C19/5719 , G01C19/5607 , H01L41/113
Abstract: A sensor includes a sensor element, defined in an XY plane, including a first member, a second member having a first portion extending from the first member in a positive Y axis direction, a second portion extending from the first portion in a positive X axis direction and a third portion extending from the second portion in a negative Y axis direction, and a third member having a first section and a second section having a rectangular shape in a top view respectively. The first portion, the second portion and the third portion extend along a periphery of the first section in the top view respectively. The second section is connected to the third portion and extends from the first section in a positive Y axis direction. A length of the second member is larger than a length of the third member in a positive X axis direction.
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