Angular velocity sensor element and angular velocity sensor using same

    公开(公告)号:US10145685B2

    公开(公告)日:2018-12-04

    申请号:US15098818

    申请日:2016-04-14

    Inventor: Kensaku Yamamoto

    Abstract: An angular velocity sensor element includes a fixing part, an extension part, a twisted extension part, a drive vibrator, a detection vibrator, and a counter beam. The extension part has a first end coupled to the fixing part, and a second end. The twisted extension part has a first end coupled to the second end of the extension part, and a second end. The drive vibrator has a first end coupled to the second end of the twisted extension part, and a second end. The drive vibrator is provided with a drive electrode. The detection vibrator is coupled to the second end of the drive vibrator, and is provided with a first detection electrode. The counter beam is coupled to the second end of the twisted extension part, disposed substantially parallel to the drive vibrator, and configured to vibrate in a direction opposite to a vibration direction of the drive vibrator.

    SENSOR
    2.
    发明申请
    SENSOR 审中-公开
    传感器

    公开(公告)号:US20160195395A1

    公开(公告)日:2016-07-07

    申请号:US15058374

    申请日:2016-03-02

    Abstract: A sensor includes a sensor element, defined in an XY plane, including a first member, a second member having a first portion extending from the first member in a positive Y axis direction, a second portion extending from the first portion in a positive X axis direction and a third portion extending from the second portion in a negative Y axis direction, and a third member having a first section and a second section having a rectangular shape in a top view respectively. The first portion, the second portion and the third portion extend along a periphery of the first section in the top view respectively. The second section is connected to the third portion and extends from the first section in a positive Y axis direction. A length of the second member is larger than a length of the third member in a positive X axis direction.

    Abstract translation: 传感器包括限定在XY平面中的传感器元件,包括第一构件,第二构件,具有从第一构件在正Y轴方向上延伸的第一部分,第二部分从正X轴从第一部分延伸 方向和从第二部分延伸到负Y轴方向的第三部分,以及分别具有第一部分和第二部分的顶部视图中的矩形形状的第三部件。 第一部分,第二部分和第三部分分别在顶视图中沿着第一部分的周边延伸。 第二部分连接到第三部分并且沿着Y轴方向从第一部分延伸。 第二构件的长度比正X轴方向上的第三构件的长度大。

    ANGULAR VELOCITY DETECTION DEVICE AND ANGULAR VELOCITY SENSOR INCLUDING THE SAME
    3.
    发明申请
    ANGULAR VELOCITY DETECTION DEVICE AND ANGULAR VELOCITY SENSOR INCLUDING THE SAME 审中-公开
    角速度检测装置和包括其的角速度传感器

    公开(公告)号:US20150204897A1

    公开(公告)日:2015-07-23

    申请号:US14676330

    申请日:2015-04-01

    Inventor: Kensaku Yamamoto

    Abstract: An angular velocity detection device includes an outer frame including fixed portions, outer beam portions connected to the fixed portions, a sensing part surrounded by the outer frame with first slit therebetween, and a joint connecting the outer frame and the sensing part. The sensing part includes an inner beam portion, a flexible portion, and a detector. The inner beam portion has a hollow region inside and is square-shaped when viewed from above. The flexible portion is formed in the hollow region of the inner beam portion, and is connected to the inner edge of the inner beam portion. The detector is disposed in the flexible portion. The first slit is formed to surround the sensing part excluding the joint.

    Abstract translation: 角速度检测装置包括:外框,包括固定部分,连接到固定部分的外光束部分;由外框包围的感测部分,其间具有第一狭缝;以及连接外框和感测部分的接合部。 感测部分包括内梁部分,柔性部分和检测器。 内梁部分具有内部的中空区域,并且当从上方观察时为正方形。 柔性部分形成在内梁部分的中空区域中,并且连接到内梁部分的内边缘。 检测器设置在柔性部分中。 第一狭缝被形成为围绕除了接头之外的感测部分。

    Angular velocity sensor
    8.
    发明授权

    公开(公告)号:US10119821B2

    公开(公告)日:2018-11-06

    申请号:US15058374

    申请日:2016-03-02

    Abstract: A sensor includes a sensor element, defined in an XY plane, including a first member, a second member having a first portion extending from the first member in a positive Y axis direction, a second portion extending from the first portion in a positive X axis direction and a third portion extending from the second portion in a negative Y axis direction, and a third member having a first section and a second section having a rectangular shape in a top view respectively. The first portion, the second portion and the third portion extend along a periphery of the first section in the top view respectively. The second section is connected to the third portion and extends from the first section in a positive Y axis direction. A length of the second member is larger than a length of the third member in a positive X axis direction.

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