- 专利标题: Semiconductor device and method of forming substrate including embedded component with symmetrical structure
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申请号: US16267142申请日: 2019-02-04
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公开(公告)号: US10665662B2公开(公告)日: 2020-05-26
- 发明人: JinHee Jung , HyungSang Park , SungSoo Kim
- 申请人: STATS ChipPAC Pte. Ltd.
- 申请人地址: SG Singapore
- 专利权人: STATS ChipPAC Pte. Ltd.
- 当前专利权人: STATS ChipPAC Pte. Ltd.
- 当前专利权人地址: SG Singapore
- 代理机构: Patent Law Group: Atkins and Associates, P.C.
- 代理商 Brian M. Kaufman; Robert D. Atkins
- 主分类号: H01L49/02
- IPC分类号: H01L49/02 ; H05K1/18 ; H01L23/538 ; H01L21/683 ; H01L23/00 ; H01L23/498 ; H01L23/50 ; H01L21/48 ; H05K3/46
摘要:
A semiconductor device comprises a first conductive layer. A second conductive layer is formed over the first conductive layer. A semiconductor component is disposed over the first conductive layer. The second conductive layer lies in a plane between a top surface of the semiconductor component and a bottom surface of the semiconductor component. A third conductive layer is formed over the semiconductor component opposite the first conductive layer. The semiconductor device includes a symmetrical structure. A first insulating layer is formed between the first conductive layer and semiconductor component. A second insulating layer is formed between the semiconductor component and third conductive layer. A height of the first insulating layer between the first conductive layer and semiconductor component is between 90% and 110% of a height of the second insulating layer between the semiconductor component and third conductive layer. The semiconductor component includes a passive device.
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