Invention Grant
- Patent Title: Processing method and processing apparatus
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Application No.: US15825310Application Date: 2017-11-29
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Publication No.: US10676823B2Publication Date: 2020-06-09
- Inventor: Ryota Sakane , Takashi Kitazawa , Hiroshi Nagahata , Hideyuki Kobayashi , Koji Yamagishi
- Applicant: Tokyo Electron Limited
- Applicant Address: JP Tokyo
- Assignee: TOKYO ELECTRON LIMITED
- Current Assignee: TOKYO ELECTRON LIMITED
- Current Assignee Address: JP Tokyo
- Agency: Pearne & Gordon LLP
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@31fbeb97
- Main IPC: C23C16/455
- IPC: C23C16/455 ; C23C16/505 ; C23C16/40

Abstract:
A processing method includes a first process of exposing a first sensor to a processing space within a chamber and blocking a second sensor from the processing space within the chamber; a second process of supplying a first processing gas containing a precursor gas into the chamber; a third process of controlling a state within the chamber based on a measurement value of the first sensor; a fourth process of blocking the first sensor from the processing space within the chamber and exposing the second sensor to the processing space within the chamber; a fifth process of supplying a second processing gas containing a reactant gas into the chamber; and a sixth process of controlling the state within the chamber based on a measurement value of the second sensor. The first process to the six process are repeatedly performed multiple times.
Public/Granted literature
- US20180148838A1 PROCESSING METHOD AND PROCESSING APPARATUS Public/Granted day:2018-05-31
Information query
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