Invention Grant
- Patent Title: Light emitter devices, optical filter structures and methods for forming light emitter devices and optical filter structures
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Application No.: US15461810Application Date: 2017-03-17
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Publication No.: US10681777B2Publication Date: 2020-06-09
- Inventor: Thoralf Kautzsch , Heiko Froehlich , Uwe Rudolph , Alessia Scire , Maik Stegemann , Mirko Vogt
- Applicant: Infineon Technologies AG
- Applicant Address: DE Neubiberg
- Assignee: INFINEON TECHNOLOGIES AG
- Current Assignee: INFINEON TECHNOLOGIES AG
- Current Assignee Address: DE Neubiberg
- Agency: Slater Matsil, LLP
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@b9effb7
- Main IPC: H05B3/00
- IPC: H05B3/00 ; H01L33/60 ; G01N29/24 ; G01N29/02 ; H01L33/52 ; H01L33/64 ; G01F1/68 ; H01L33/44
Abstract:
A light emitter device contains a heater structure configured to emit light if a predefined current flows through the heater structure. The heater structure is arranged at a heater carrier structure. The light emitter device contains an upper portion of a cavity located vertically between the heater carrier structure and a cover structure. The light emitter device contains a lower portion of the cavity located vertically between the heater carrier structure and at least a portion of a carrier substrate. The heater carrier structure contains a plurality of holes connecting the upper portion of the cavity and the lower portion of the cavity. A pressure within the cavity is less than 100 mbar.
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