Invention Grant
- Patent Title: On-chip biosensors with nanometer scale glass-like carbon electrodes and improved adhesive coupling
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Application No.: US15802802Application Date: 2017-11-03
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Publication No.: US10684246B2Publication Date: 2020-06-16
- Inventor: Hariklia Deligianni , Bruce B. Doris , Damon B. Farmer , Steven J. Holmes , Qinghuang Lin , Nathan P. Marchack , Deborah A. Neumayer , Roy R. Yu
- Applicant: International Business Machines Corporation
- Applicant Address: US NY Armonk
- Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee Address: US NY Armonk
- Agency: Cantor Colburn LLP
- Agent Vazken Alexanian
- Main IPC: G01N27/327
- IPC: G01N27/327 ; G01N27/48 ; G01N33/94 ; H01L21/768 ; H01L23/48 ; H01L23/528 ; G01N33/543 ; H01L27/15 ; G01N33/487

Abstract:
Embodiments of the invention are directed to a biosensing integrated circuit (IC). A non-limiting example of the biosensing IC includes a plurality of semiconductor substrate layers. A sensor element is formed over a first one of the plurality of semiconductor substrate layers, wherein the sensor element is configured to, based at least in part on the sensor element interacting with a predetermined material, generate data representing a measurable electrical parameter. An adhesion enhancement region is configured to physically couple the sensor element to the first one of the plurality of semiconductor substrate layers. In some embodiments of the invention, the biosensing IC further includes an electrically conductive interconnect network configured to communicatively couple the data representing the measurable electrical parameter to computer elements.
Public/Granted literature
- US20190101504A1 ON-CHIP BIOSENSORS WITH NANOMETER SCALE GLASS-LIKE CARBON ELECTRODES AND IMPROVED ADHESIVE COUPLING Public/Granted day:2019-04-04
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