Invention Grant
- Patent Title: System and method for providing a clean environment in an electron-optical system
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Application No.: US15164273Application Date: 2016-05-25
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Publication No.: US10692692B2Publication Date: 2020-06-23
- Inventor: William G. Schultz , Gildardo Delgado , Garry A. Rose
- Applicant: KLA-Tencor Corporation
- Applicant Address: US CA Milpitas
- Assignee: KLA-Tencor Corporation
- Current Assignee: KLA-Tencor Corporation
- Current Assignee Address: US CA Milpitas
- Agency: Suiter Swantz pc llo
- Main IPC: H01J37/28
- IPC: H01J37/28 ; H01J3/02 ; H01J37/065 ; H01J7/18 ; H01J3/40
Abstract:
An electron extractor of an electron source capable of absorbing contaminant materials from a cavity proximate to the extractor is disclosed. The electron extractor includes a body. The body of the electron extractor is formed from one or more non-evaporable getter materials. The one or more non-evaporable getter materials absorb one or more contaminants contained within a region proximate to the body of the electron extractor. The body of the electron extractor is further configured to extract electrons from one or more emitters posited proximate to the body of the electron extractor.
Public/Granted literature
- US20160358741A1 System and Method for Providing a Clean Environment in an Electron-Optical System Public/Granted day:2016-12-08
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