公开(公告)号：US09842724B2

公开(公告)日：2017-12-12

申请号：US15012599

申请日：2016-02-01

Applicant: KLA-Tencor Corporation

Inventor： William G. Schultz ,  Gildardo Delgado ,  Garry A. Rose

IPC: H01J37/28 ,  G03F1/62 ,  G03F1/86

CPC classification number: H01J37/28 ,  G03F1/62 ,  G03F1/86 ,  H01J37/244 ,  H01J2237/2002 ,  H01J2237/2445 ,  H01J2237/24475 ,  H01J2237/2448 ,  H01J2237/2449 ,  H01J2237/2817

Abstract: A system for imaging a sample through a protective pellicle is disclosed. The system includes an electron beam source configured to generate an electron beam and a sample stage configured to secure a sample and a pellicle, wherein the pellicle is disposed above the sample. The system also includes an electron-optical column including a set of electron-optical elements to direct at least a portion of the electron beam through the pellicle and onto a portion of the sample. In addition, the system includes a detector assembly positioned above the pellicle and configured to detect electrons emanating from the surface of the sample.

公开(公告)号：US20160358741A1

公开(公告)日：2016-12-08

申请号：US15164273

申请日：2016-05-25

Applicant: KLA-Tencor Corporation

Inventor： William G. Schultz ,  Gildardo Delgado ,  Garry A. Rose

IPC: H01J37/04 ,  H01J37/29

Abstract: An electron extractor of an electron source capable of absorbing contaminant materials from a cavity proximate to the extractor is disclosed. The electron extractor includes a body. The body of the electron extractor is formed from one or more non-evaporable getter materials. The one or more non-evaporable getter materials absorb one or more contaminants contained within a region proximate to the body of the electron extractor. The body of the electron extractor is further configured to extract electrons from one or more emitters posited proximate to the body of the electron extractor.

Abstract translation: 公开了能够从靠近提取器的空腔吸收污染物质的电子源的电子提取器。 电子提取器包括一个主体。 电子提取器的主体由一种或多种不可蒸发的吸气剂材料形成。 所述一种或多种不可蒸发的吸气剂材料吸收包含在靠近电子提取器主体的区域内的一种或多种污染物。 电子提取器的主体还被配置为从靠近电子提取器的主体定位的一个或多个发射器提取电子。

公开(公告)号：US10692692B2

公开(公告)日：2020-06-23

申请号：US15164273

申请日：2016-05-25

Applicant: KLA-Tencor Corporation

Inventor： William G. Schultz ,  Gildardo Delgado ,  Garry A. Rose

IPC: H01J37/28 ,  H01J3/02 ,  H01J37/065 ,  H01J7/18 ,  H01J3/40

Abstract: An electron extractor of an electron source capable of absorbing contaminant materials from a cavity proximate to the extractor is disclosed. The electron extractor includes a body. The body of the electron extractor is formed from one or more non-evaporable getter materials. The one or more non-evaporable getter materials absorb one or more contaminants contained within a region proximate to the body of the electron extractor. The body of the electron extractor is further configured to extract electrons from one or more emitters posited proximate to the body of the electron extractor.

公开(公告)号：US09984846B2

公开(公告)日：2018-05-29

申请号：US15217158

申请日：2016-07-22

Applicant: KLA-Tencor Corporation

Inventor： William G. Schultz ,  Gildardo R. Delgado ,  Frances Hill ,  Edgardo Garcia Berrios ,  Rudy Garcia

IPC: H01J1/34 ,  H01J1/304 ,  H01J9/02 ,  H01J19/24

CPC classification number: H01J1/3044 ,  H01J1/34 ,  H01J9/025 ,  H01J19/24 ,  H01J19/82 ,  H01J2201/30411 ,  H01J2201/30449 ,  H01J2201/30492 ,  H01J2209/0223

Abstract: An emitter containing a metal boride material has an at least partly rounded tip with a radius of 1 μm or less. An electric field can be applied to the emitter and an electron beam is generated from the emitter. To form the emitter, material is removed from a single crystal rod to form an emitter containing a metal boride material having a rounded tip with a radius of 1 μm or less.

公开(公告)号：US20180005791A1

公开(公告)日：2018-01-04

申请号：US15217158

申请日：2016-07-22

Applicant: KLA-Tencor Corporation

Inventor： William G. Schultz ,  Gildardo R. Delgado ,  Frances Hill ,  Edgardo Garcia Berrios ,  Rudy Garcia

IPC: H01J1/304 ,  H01J19/24 ,  H01J1/34 ,  H01J9/02

CPC classification number: H01J1/3044 ,  H01J1/34 ,  H01J9/025 ,  H01J19/24 ,  H01J19/82 ,  H01J2201/30411 ,  H01J2201/30449 ,  H01J2201/30492 ,  H01J2209/0223

Abstract: An emitter containing a metal boride material has an at least partly rounded tip with a radius of 1 μm or less. An electric field can be applied to the emitter and an electron beam is generated from the emitter. To form the emitter, material is removed from a single crystal rod to form an emitter containing a metal boride material having a rounded tip with a radius of 1 μm or less.

公开(公告)号：US20160225582A1

公开(公告)日：2016-08-04

申请号：US15012599

申请日：2016-02-01

Applicant: KLA-Tencor Corporation

Inventor： William G. Schultz ,  Gildardo Delgado ,  Garry A. Rose

IPC: H01J37/28 ,  H01J37/147 ,  H01J37/26

CPC classification number: H01J37/28 ,  G03F1/62 ,  G03F1/86 ,  H01J37/244 ,  H01J2237/2002 ,  H01J2237/2445 ,  H01J2237/24475 ,  H01J2237/2448 ,  H01J2237/2449 ,  H01J2237/2817

Abstract: A system for imaging a sample through a protective pellicle is disclosed. The system includes an electron beam source configured to generate an electron beam and a sample stage configured to secure a sample and a pellicle, wherein the pellicle is disposed above the sample. The system also includes an electron-optical column including a set of electron-optical elements to direct at least a portion of the electron beam through the pellicle and onto a portion of the sample. In addition, the system includes a detector assembly positioned above the pellicle and configured to detect electrons emanating from the surface of the sample.

Abstract translation: 公开了一种通过保护性薄膜成像样品的系统。 该系统包括被配置为产生电子束的电子束源和被配置为固定样品和防护薄膜组件的样品台，其中防护薄膜组件设置在样品上方。 该系统还包括电子 - 光学柱，其包括一组电子 - 光学元件，以将至少一部分电子束通过防护薄膜组件引导到样品的一部分上。 此外，该系统包括位于防护薄膜组件上方并被配置成检测从样品表面发出的电子的检测器组件。