Invention Grant
- Patent Title: X-ray device, X-ray irradiation method, and manufacturing method for structure
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Application No.: US14221319Application Date: 2014-03-21
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Publication No.: US10705030B2Publication Date: 2020-07-07
- Inventor: Takashi Watanabe
- Applicant: NIKON CORPORATION
- Applicant Address: JP Tokyo
- Assignee: Nikon Corporation
- Current Assignee: Nikon Corporation
- Current Assignee Address: JP Tokyo
- Agency: Finnegan, Henderson, Farabow, Garrett & Dunner, L.L.P.
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@6901ebb6
- Main IPC: G01N23/04
- IPC: G01N23/04 ; G01N23/046 ; G01N23/18 ; H01J35/06 ; H01J35/08 ; H01J35/12 ; H01J35/14 ; H01J35/16 ; H05G1/04 ; H05G1/06 ; H05G1/02 ; H01J35/04

Abstract:
Provided is an x-ray device capable of suppressing reduction in detection precision. The X-ray device irradiates x-rays on an object and detects X-rays that pass through the object. The X-ray device comprises: an X-ray source that emits X-rays; a stage that holds the object; a detection device that detects at least some of the x-rays that have been emitted from the X-ray source and have passed through the object; a chamber member that forms an internal space wherein the X-ray source, the stage, and the detection device are arranged; and a partitioning section that separates the internal space into a first space wherein the X-ray source is arranged and a second space wherein the detection device is arranged.
Public/Granted literature
- US20140283385A1 X-RAY DEVICE, X-RAY IRRADIATION METHOD, AND MANUFACTURING METHOD FOR STRUCTURE Public/Granted day:2014-09-25
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