Invention Grant
- Patent Title: Probe card continuity testing and cleaning fixture comprising highly purified tungsten
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Application No.: US15890270Application Date: 2018-02-06
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Publication No.: US10705121B2Publication Date: 2020-07-07
- Inventor: Ronald A. Feroli , John Cassels , Matthew F. Stanton
- Applicant: GLOBALFOUNDRIES INC.
- Applicant Address: KY Grand Cayman
- Assignee: GLOBALFOUNDRIES INC.
- Current Assignee: GLOBALFOUNDRIES INC.
- Current Assignee Address: KY Grand Cayman
- Agency: Williams Morgan, P.C.
- Main IPC: G01R1/073
- IPC: G01R1/073 ; G01R31/26 ; G01R35/00 ; G01R3/00

Abstract:
A continuity testing and cleaning fixture includes a continuity test area disposed on a portion of a first surface of the fixture, wherein the continuity test area comprises an upper region comprising at least 99.99 wt % tungsten. The continuity testing and cleaning fixture may be used in a method involving contacting at least two conductive elements of a probe card with a continuity test area of a continuity testing and cleaning fixture, wherein the continuity test area comprises an upper region comprising at least 99.99 wt % tungsten; determining an electrical resistance between the at least two conductive elements; and cleaning the at least two conductive elements with at least one cleaning zone of the continuity testing and cleaning fixture in response to determining the electrical resistance to be above a first threshold.
Public/Granted literature
- US20190242927A1 PROBE CARD CONTINUITY TESTING AND CLEANING FIXTURE COMPRISING HIGHLY PURIFIED TUNGSTEN Public/Granted day:2019-08-08
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