公开(公告)号：US20190242927A1

公开(公告)日：2019-08-08

申请号：US15890270

申请日：2018-02-06

Applicant: GLOBALFOUNDRIES INC.

Inventor： Ronald A. Feroli ,  John Cassels ,  Matthew F. Stanton

IPC: G01R1/073 ,  G01R31/26

Abstract: A continuity testing and cleaning fixture includes a continuity test area disposed on a portion of a first surface of the fixture, wherein the continuity test area comprises an upper region comprising at least 99.99 wt % tungsten. The continuity testing and cleaning fixture may be used in a method involving contacting at least two conductive elements of a probe card with a continuity test area of a continuity testing and cleaning fixture, wherein the continuity test area comprises an upper region comprising at least 99.99 wt % tungsten; determining an electrical resistance between the at least two conductive elements; and cleaning the at least two conductive elements with at least one cleaning zone of the continuity testing and cleaning fixture in response to determining the electrical resistance to be above a first threshold.

公开(公告)号：US10705121B2

公开(公告)日：2020-07-07

申请号：US15890270

申请日：2018-02-06

Applicant: GLOBALFOUNDRIES INC.

Inventor： Ronald A. Feroli ,  John Cassels ,  Matthew F. Stanton

IPC: G01R1/073 ,  G01R31/26 ,  G01R35/00 ,  G01R3/00

Abstract: A continuity testing and cleaning fixture includes a continuity test area disposed on a portion of a first surface of the fixture, wherein the continuity test area comprises an upper region comprising at least 99.99 wt % tungsten. The continuity testing and cleaning fixture may be used in a method involving contacting at least two conductive elements of a probe card with a continuity test area of a continuity testing and cleaning fixture, wherein the continuity test area comprises an upper region comprising at least 99.99 wt % tungsten; determining an electrical resistance between the at least two conductive elements; and cleaning the at least two conductive elements with at least one cleaning zone of the continuity testing and cleaning fixture in response to determining the electrical resistance to be above a first threshold.