Invention Grant
- Patent Title: Adaptable-modular optical sensor based process control system, and method of operation thereof
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Application No.: US15909265Application Date: 2018-03-01
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Publication No.: US10763144B2Publication Date: 2020-09-01
- Inventor: Sean Lynes , Richard J. Daignault, Jr. , Zhiyong Gu , Hong Chen
- Applicant: Verity Instruments, Inc.
- Applicant Address: US TX Carrollton
- Assignee: Verity Instruments, Inc.
- Current Assignee: Verity Instruments, Inc.
- Current Assignee Address: US TX Carrollton
- Main IPC: H01L21/67
- IPC: H01L21/67 ; H01L21/66 ; G05B19/00

Abstract:
A method of operating a process control system and a process control system are provided by the disclosure. In one embodiment, the process control system includes: (1) an optical sensor configured to monitor a production process within a process chamber and generate optical data therefrom, (2) an operational controller configured to perform critical functions to determine processing conditions of the production process from the optical data, wherein the critical functions are directed by critical function controls, (3) an adaptable management controller configured to provide the critical function controls to the operational controller, wherein the adaptable management controller is hierarchically isolated from the operational controller during the critical functions.
Public/Granted literature
- US20190273007A1 ADAPTABLE-MODULAR OPTICAL SENSOR BASED PROCESS CONTROL SYSTEM, AND METHOD OF OPERATION THEREOF Public/Granted day:2019-09-05
Information query
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