公开(公告)号：US10763144B2

公开(公告)日：2020-09-01

申请号：US15909265

申请日：2018-03-01

Applicant: Verity Instruments, Inc.

Inventor： Sean Lynes ,  Richard J. Daignault, Jr. ,  Zhiyong Gu ,  Hong Chen

IPC: H01L21/67 ,  H01L21/66 ,  G05B19/00

Abstract: A method of operating a process control system and a process control system are provided by the disclosure. In one embodiment, the process control system includes: (1) an optical sensor configured to monitor a production process within a process chamber and generate optical data therefrom, (2) an operational controller configured to perform critical functions to determine processing conditions of the production process from the optical data, wherein the critical functions are directed by critical function controls, (3) an adaptable management controller configured to provide the critical function controls to the operational controller, wherein the adaptable management controller is hierarchically isolated from the operational controller during the critical functions.

公开(公告)号：US20190273007A1

公开(公告)日：2019-09-05

申请号：US15909265

申请日：2018-03-01

Applicant: Verity Instruments, Inc.

Inventor： Sean Lynes ,  Richard J. Daignault, JR. ,  Zhiyong Gu ,  Hong Chen

IPC: H01L21/67 ,  H01L21/66

Abstract: A method of operating a process control system and a process control system are provided by the disclosure. In one embodiment, the process control system includes: (1) an optical sensor configured to monitor a production process within a process chamber and generate optical data therefrom, (2) an operational controller configured to perform critical functions to determine processing conditions of the production process from the optical data, wherein the critical functions are directed by critical function controls, (3) an adaptable management controller configured to provide the critical function controls to the operational controller, wherein the adaptable management controller is hierarchically isolated from the operational controller during the critical functions.