公开(公告)号：US10763144B2

公开(公告)日：2020-09-01

申请号：US15909265

申请日：2018-03-01

Applicant: Verity Instruments, Inc.

Inventor： Sean Lynes ,  Richard J. Daignault, Jr. ,  Zhiyong Gu ,  Hong Chen

IPC: H01L21/67 ,  H01L21/66 ,  G05B19/00

Abstract: A method of operating a process control system and a process control system are provided by the disclosure. In one embodiment, the process control system includes: (1) an optical sensor configured to monitor a production process within a process chamber and generate optical data therefrom, (2) an operational controller configured to perform critical functions to determine processing conditions of the production process from the optical data, wherein the critical functions are directed by critical function controls, (3) an adaptable management controller configured to provide the critical function controls to the operational controller, wherein the adaptable management controller is hierarchically isolated from the operational controller during the critical functions.

公开(公告)号：US11424115B2

公开(公告)日：2022-08-23

申请号：US15927729

申请日：2018-03-21

Applicant: Verity Instruments, Inc.

Inventor： Larry Arlos Bullock ,  John D. Corless ,  Richard J. Daignault, Jr. ,  Mark Anthony Meloni ,  Mike Whelan

IPC: H01J49/02 ,  H04N5/378 ,  H04N5/357 ,  G01B11/06 ,  H04N5/372 ,  H04N5/355 ,  H01L27/148 ,  H04N5/347 ,  G01N21/31 ,  G01N21/71 ,  G01N21/17 ,  G01J3/443

Abstract: The disclosure provides multimode configurable spectrometers, a method of operating a multimode configurable spectrometer, and an optical monitoring system. In one embodiment the multimode configurable spectrometer includes: (1) an optical sensor configured to receive an optical input and convert the optical input to electrical signals, wherein the optical sensor includes multiple active pixel regions for converting the optical input to the electrical signals, and (2) conversion circuitry, having multiple selectable converting circuits, that is configured to receive and convert the electrical signals to a digital output according to a selected one of the selectable converting circuits.