A micropump includes: a pumping chamber, between a first semiconductor substrate and a second semiconductor substrate bonded to each other; an inlet valve, having an inlet shutter element between an inlet passage and the pumping chamber; an outlet valve, having an outlet shutter element between the pumping chamber and an outlet passage; a first recess for housing the inlet shutter element when the inlet valve is in the open configuration, the first recess and the pumping chamber being fluidly coupled; a second recess for housing the outlet shutter element when the outlet valve is in the open configuration, the second recess and the pumping chamber being fluidly decoupled.