公开(公告)号：US10767641B2

公开(公告)日：2020-09-08

申请号：US15740665

申请日：2016-07-01

Applicant: POLITECNICO DI MILANO

Inventor： Alberto Corigliano ,  Raffaele Ardito ,  Emanuele Bertarelli ,  Marco Ferrera

IPC: F04B43/04 ,  F04B43/02 ,  F04B49/06 ,  F04B53/10 ,  F04B45/047 ,  F04B45/04

Abstract: A micropump includes: a pumping chamber, between a first semiconductor substrate and a second semiconductor substrate bonded to each other; an inlet valve, having an inlet shutter element between an inlet passage and the pumping chamber; an outlet valve, having an outlet shutter element between the pumping chamber and an outlet passage; a first recess for housing the inlet shutter element when the inlet valve is in the open configuration, the first recess and the pumping chamber being fluidly coupled; a second recess for housing the outlet shutter element when the outlet valve is in the open configuration, the second recess and the pumping chamber being fluidly decoupled.

公开(公告)号：US20180187668A1

公开(公告)日：2018-07-05

申请号：US15740665

申请日：2016-07-01

Applicant: POLITECNICO DI MILANO

Inventor： Alberto Corigliano ,  Raffaele Ardito ,  Emanuele Bertarelli ,  Marco Ferrera

IPC: F04B43/04 ,  F04B49/06 ,  F04B53/10

Abstract: A micropump includes: a pumping chamber, between a first semiconductor substrate and a second semiconductor substrate bonded to each other; an inlet valve, having an inlet shutter element between an inlet passage and the pumping chamber; an outlet valve, having an outlet shutter element between the pumping chamber and an outlet passage; a first recess for housing the inlet shutter element when the inlet valve is in the open configuration, the first recess and the pumping chamber being fluidly coupled; a second recess for housing the outlet shutter element when the outlet valve is in the open configuration, the second recess and the pumping chamber being fluidly decoupled.