- 专利标题: Location-specific laser annealing to improve interconnect microstructure
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申请号: US16669708申请日: 2019-10-31
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公开(公告)号: US10770348B2公开(公告)日: 2020-09-08
- 发明人: Benjamin David Briggs , Lawrence A. Clevenger , Bartlet H. Deprospo , Michael Rizzolo
- 申请人: International Business Machines Corporation
- 申请人地址: US NY Armonk
- 专利权人: INTERNATIONAL BUSINESS MACHINES CORPORATION
- 当前专利权人: INTERNATIONAL BUSINESS MACHINES CORPORATION
- 当前专利权人地址: US NY Armonk
- 代理机构: McGinn IP Law Group, PLLC
- 代理商 Vazken Alexanian
- 主分类号: H01L21/00
- IPC分类号: H01L21/00 ; H01L21/768 ; H01L21/67 ; H01L21/66 ; B23K26/082 ; B23K26/00 ; B23K26/03 ; B23K26/70 ; B23K26/062 ; B23K26/352 ; H01L23/532
摘要:
A method (and structure) includes performing an initial partial anneal of a metal interconnect overburden layer for semiconductor devices being fabricated on a chip on a semiconductor wafer. Orientation of an early recrystallizing grain at a specific location on a top surface of the metal overburden layer is determined, as implemented and controlled by a processor on a computer. A determination is made whether the orientation of the early recrystallizing grain is desirable or undesirable.
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