Invention Grant
- Patent Title: Vertical type semiconductor devices and methods of manufacturing the same
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Application No.: US16122037Application Date: 2018-09-05
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Publication No.: US10770473B2Publication Date: 2020-09-08
- Inventor: Sung-Yun Lee , Jae-Hoon Jang , Jae-Duk Lee , Joon-Hee Lee , Young-Jin Jung
- Applicant: Samsung Electronics Co., Ltd.
- Applicant Address: KR Gyeonggi-do
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR Gyeonggi-do
- Agency: Harness, Dickey & Pierce, P.L.C.
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@4a918578
- Main IPC: H01L27/11556
- IPC: H01L27/11556 ; H01L27/11582 ; H01L21/768 ; H01L21/308 ; H01L21/28 ; H01L27/11565

Abstract:
A vertical type semiconductor device includes insulation patterns on a substrate and spaced apart from each other in a first direction perpendicular to a top surface of the substrate, a channel structure on the substrate and penetrating through the insulation patterns, a first conductive pattern partially filling a gap between the insulation patterns adjacent to each other in the first direction and the channel structure and having a slit in a surface thereof, the slit extending in a direction parallel with the top surface of the substrate, and a second conductive pattern on the first conductive pattern in the gap and filling the slit.
Public/Granted literature
- US20190164989A1 VERTICAL TYPE SEMICONDUCTOR DEVICES AND METHODS OF MANUFACTURING THE SAME Public/Granted day:2019-05-30
Information query
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