Invention Grant
- Patent Title: Micro-electro-mechanical device with reduced temperature sensitivity and manufacturing method thereof
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Application No.: US15976611Application Date: 2018-05-10
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Publication No.: US10771042B2Publication Date: 2020-09-08
- Inventor: Gabriele Gattere , Lorenzo Corso , Alessandro Tocchio , Carlo Valzasina
- Applicant: STMicroelectronics S.r.l.
- Applicant Address: IT Agrate Brianza
- Assignee: STMicroeletronics S.r.l.
- Current Assignee: STMicroeletronics S.r.l.
- Current Assignee Address: IT Agrate Brianza
- Agency: Seed Intellectual Property Law Group LLP
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@26c7724a
- Main IPC: H03H9/02
- IPC: H03H9/02 ; H03H9/24 ; H03H3/007 ; H03H9/46 ; H03H9/05
Abstract:
A microelectromechanical device having a mobile structure including mobile arms formed from a composite material and having a fixed structure including fixed arms capacitively coupled to the mobile arms. The composite material includes core regions of insulating material and a silicon coating.
Public/Granted literature
- US20180342998A1 MICRO-ELECTRO-MECHANICAL DEVICE WITH REDUCED TEMPERATURE SENSITIVITY AND MANUFACTURING METHOD THEREOF Public/Granted day:2018-11-29
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