Invention Grant
- Patent Title: Solid-state imaging device with uneven structures and the method for manufacturing the same, and electronic apparatus
-
Application No.: US16251531Application Date: 2019-01-18
-
Publication No.: US10771664B2Publication Date: 2020-09-08
- Inventor: Yoshiaki Masuda , Yuki Miyanami , Hideshi Abe , Tomoyuki Hirano , Masanari Yamaguchi , Yoshiki Ebiko , Kazufumi Watanabe , Tomoharu Ogita
- Applicant: SONY CORPORATION
- Applicant Address: JP Tokyo
- Assignee: Sony Corporation
- Current Assignee: Sony Corporation
- Current Assignee Address: JP Tokyo
- Agency: Sheridan Ross P.C.
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@621b3959 com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@75b89d7f
- Main IPC: H04N5/225
- IPC: H04N5/225 ; G02B1/118 ; H01L27/146 ; H04N5/369 ; H01L31/0232 ; H04N5/359 ; H04N5/374 ; H04N9/04 ; H01L31/0203 ; H01L31/10

Abstract:
The present disclosure relates to a solid-state imaging device, a method for manufacturing the same, and an electronic apparatus capable of improving sensitivity while suppressing degradation of color mixture. The solid-state imaging device includes an anti-reflection portion having a moth-eye structure provided on a boundary surface on a light-receiving surface side of a photoelectric conversion region of each pixel arranged two-dimensionally, and an inter-pixel light-blocking portion provided below the boundary surface of the anti-reflection portion to block incident light. In addition, the photoelectric conversion region is a semiconductor region, and the inter-pixel light-blocking portion has a trench structure obtained by digging the semiconductor region in a depth direction at a pixel boundary. The techniques according to the present disclosure can be applied to, for example, a solid-state imaging device of a rear surface irradiation type.
Public/Granted literature
- US20190174033A1 SOLID-STATE IMAGING DEVICE AND METHOD FOR MANUFACTURING THE SAME, AND ELECTRONIC APPARATUS Public/Granted day:2019-06-06
Information query