- Patent Title: Substrate with transparent electrode and method for producing same
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Application No.: US16294100Application Date: 2019-03-06
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Publication No.: US10777709B2Publication Date: 2020-09-15
- Inventor: Takashi Kuchiyama , Hironori Hayakawa , Hiroaki Ueda , Yuji Motohara , Kenji Yamamoto
- Applicant: KANEKA CORPORATION
- Applicant Address: JP Osaka-shi, Osaka
- Assignee: KANEKA CORPORATION
- Current Assignee: KANEKA CORPORATION
- Current Assignee Address: JP Osaka-shi, Osaka
- Agency: Alleman Hall Creasman & Tuttle LLP
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@68579369
- Main IPC: H01L33/42
- IPC: H01L33/42 ; G06F3/041 ; C23C14/02 ; C23C14/08 ; C23C14/58 ; G06F3/044 ; H01L31/0224 ; H01L31/0392 ; C23C14/35

Abstract:
Provided is a substrate with transparent electrode, which is capable of achieving both acceleration of crystallization dining a heat treatment and suppression of crystallization under a normal temperature environment. In the substrate with transparent electrode, a transparent electrode thin-film formed of a transparent conductive oxide is formed on a film substrate. An underlayer that contains a metal oxide as a main component is formed between the film substrate and the transparent electrode thin-film. The underlayer and the transparent electrode thin-film are in contact with each other. The transparent electrode thin-film is amorphous, and the base layer is dielectric and crystalline.
Public/Granted literature
- US20190207060A1 SUBSTRATE WITH TRANSPARENT ELECTRODE AND METHOD FOR PRODUCING SAME Public/Granted day:2019-07-04
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