Invention Grant
- Patent Title: Memory device and manufacturing method thereof
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Application No.: US16171353Application Date: 2018-10-25
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Publication No.: US10784278B2Publication Date: 2020-09-22
- Inventor: Yong-Sheng Huang , Ming-Chyi Liu
- Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
- Applicant Address: TW Hsinchu
- Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee Address: TW Hsinchu
- Agency: JCIPRNET
- Main IPC: H01L27/11582
- IPC: H01L27/11582 ; H01L27/11568 ; H01L21/28 ; H01L23/528

Abstract:
A memory device and a manufacturing method are provided. The memory device includes a plurality of memory cells stacked on a substrate. The memory cell includes two conductive patterns, a channel pillar, a gate pattern and a charge storage layer. The two conductive patterns are stacked on the substrate. The channel pillar extends between the two conductive patterns along a stacking direction of the two conductive patterns, and is electrically connected with the two conductive patterns. The gate pattern is disposed between the two conductive patterns and located at a sidewall of the channel pillar. The charge storage layer is disposed between the gate pattern and the channel pillar.
Public/Granted literature
- US20200035701A1 MEMORY DEVICE AND MANUFACTURING METHOD THEREOF Public/Granted day:2020-01-30
Information query
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