Invention Grant
- Patent Title: Microwave applicator with solid-state generator power source
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Application No.: US15460611Application Date: 2017-03-16
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Publication No.: US10790118B2Publication Date: 2020-09-29
- Inventor: Mohammad Kamarehi , Ken Trenholm , Colin Sanford , Kevin Wenzel , Olivia Keller
- Applicant: MKS Instruments, Inc.
- Applicant Address: US MA Andover
- Assignee: MKS Instruments, Inc.
- Current Assignee: MKS Instruments, Inc.
- Current Assignee Address: US MA Andover
- Agency: Burns & Levinson, LLP
- Agent Joseph M. Maraia; Steven M. Mills
- Main IPC: H01J37/32
- IPC: H01J37/32 ; H05B6/64 ; H01L21/67 ; H05B6/68 ; H05B6/70 ; H05B6/80 ; H01P5/10 ; H01P1/20

Abstract:
A microwave system has a solid-state generator which generates microwave energy and includes at least one control input for receiving a control signal to vary electrically a parameter of the microwave energy. A microwave load receives the microwave energy and produces an effect in response to the microwave energy. A microwave conducting element couples the microwave energy to the microwave load. An impedance match adjusting device is coupled to the microwave conducting element to vary at least one of the parameters of the microwave energy. The effect produced in response to the microwave energy is altered by both electrical variation of the parameter of the microwave energy via the control signal and adjustment of the impedance match adjusting device to vary the parameter of the microwave energy.
Public/Granted literature
- US20180269037A1 MICROWAVE APPLICATOR WITH SOLID-STATE GENERATOR POWER SOURCE Public/Granted day:2018-09-20
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