- 专利标题： Microwave applicator with solid-state generator power source
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申请号： US15460611申请日： 2017-03-16
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公开(公告)号： US10790118B2公开(公告)日： 2020-09-29
- 发明人: Mohammad Kamarehi , Ken Trenholm , Colin Sanford , Kevin Wenzel , Olivia Keller
- 申请人： MKS Instruments, Inc.
- 申请人地址： US MA Andover
- 专利权人： MKS Instruments, Inc.
- 当前专利权人： MKS Instruments, Inc.
- 当前专利权人地址： US MA Andover
- 代理机构： Burns & Levinson, LLP
- 代理商 Joseph M. Maraia; Steven M. Mills
- 主分类号： H01J37/32
- IPC分类号： H01J37/32 ; H05B6/64 ; H01L21/67 ; H05B6/68 ; H05B6/70 ; H05B6/80 ; H01P5/10 ; H01P1/20
摘要：
A microwave system has a solid-state generator which generates microwave energy and includes at least one control input for receiving a control signal to vary electrically a parameter of the microwave energy. A microwave load receives the microwave energy and produces an effect in response to the microwave energy. A microwave conducting element couples the microwave energy to the microwave load. An impedance match adjusting device is coupled to the microwave conducting element to vary at least one of the parameters of the microwave energy. The effect produced in response to the microwave energy is altered by both electrical variation of the parameter of the microwave energy via the control signal and adjustment of the impedance match adjusting device to vary the parameter of the microwave energy.
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